Title:
METHOD FOR CONTROLLING THE OPERATION OF TWO-STAGE REFRIGERATOR, METHOD FOR CONTROLLING THE OPERATION OF CRYO PUMP EQUIPPED WITH TWO-STAGE REFRIGERATOR, TWO-STAGE REFRIGERATOR, CRYO PUMP, AND VACUUM SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/097888
Kind Code:
A1
Abstract:
The temperature of a second cooling stage (7) is detected. Based on the temperature of the second cooling stage (7) detected, a heating means (12) arranged on a first cooling stage (6) is put into operation. Upon the operation of the heating means (12), the frequency of a driving power supply in a refrigerator is changed. By utilizing this phenomenon, the refrigerating ability of the second cooling stage (7) is controlled.
Inventors:
AOKI KAZUTOSHI (JP)
OKADA TAKAHIRO (JP)
KOMAI HISAYOSHI (JP)
OKADA TAKAHIRO (JP)
KOMAI HISAYOSHI (JP)
Application Number:
PCT/JP2009/053269
Publication Date:
September 02, 2010
Filing Date:
February 24, 2009
Export Citation:
Assignee:
CANON ANELVA TECHNIX CORP (JP)
AOKI KAZUTOSHI (JP)
OKADA TAKAHIRO (JP)
KOMAI HISAYOSHI (JP)
AOKI KAZUTOSHI (JP)
OKADA TAKAHIRO (JP)
KOMAI HISAYOSHI (JP)
International Classes:
F04B37/08; F25B9/14
Foreign References:
| JP2008292103A | 2008-12-04 | |||
| JPH0893643A | 1996-04-09 |
Attorney, Agent or Firm:
OHTSUKA, YASUNORI (JP)
Yasunari Otsuka (JP)
Yasunari Otsuka (JP)
Download PDF: