Title:
METHOD FOR CONTROLLING SURFACE GLOSS OF METAL WORKPIECE, AND METHOD FOR PREPARING METAL FILM
Document Type and Number:
WIPO Patent Application WO/2023/284013
Kind Code:
A1
Abstract:
A method for controlling the surface gloss of a metal workpiece, and a method for preparing a metal film. The method for controlling the surface gloss of a metal workpiece comprises: providing a metal workpiece; measuring the surface gloss of the metal workpiece to obtain a first measured value; and performing treatment on the metal workpiece using different processes according to difference in the first measured value, so that the surface gloss of the metal workpiece meets production requirements. The use of the control method improves the surface gloss of a metal workpiece, thereby improving the resistivity and film thickness uniformity of a formed metal film.
Inventors:
WU DENGHUI (CN)
Application Number:
PCT/CN2021/108987
Publication Date:
January 19, 2023
Filing Date:
July 28, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G01N21/57; C23F3/00; G01R27/02
Foreign References:
| CN113031513A | 2021-06-25 | |||
| CN101619447A | 2010-01-06 | |||
| CN109968186A | 2019-07-05 | |||
| US20090200263A1 | 2009-08-13 | |||
| US4317698A | 1982-03-02 | |||
| US20010036676A1 | 2001-11-01 |
Attorney, Agent or Firm:
BOXIN CHINA INTELLECTUAL PROPERTY (CN)
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