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Title:
METHOD FOR CORRECTING COORDINATE MEASUREMENT MACHINE ERRORS
Document Type and Number:
WIPO Patent Application WO/2016/151101
Kind Code:
A3
Abstract:
The invention provides a method for creating or refining a mathematical correction model for correcting dybamic measurement errors in a co-ordinate measurement machine having at least 3 linear machine axes X, Y, and Z, each comprising a machine linear scale, and provided with a measurement probe. An error model for considering acceleration errors is created and refined using actual measurements of the probe position when accelerating. Also the probe offset from the linear translation axes is considered.

Inventors:
STOTT CHRISTOPHER (GB)
OSBORNE NICHOLAS PATRICK (GB)
VANDENHOUDT GEERT (BE)
Application Number:
PCT/EP2016/056623
Publication Date:
October 27, 2016
Filing Date:
March 24, 2016
Export Citation:
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Assignee:
NIKON METROLOGY NV (BE)
International Classes:
G01B21/04; H01B7/00; H01B11/00
Foreign References:
US5594668A1997-01-14
US20090037128A12009-02-05
US20110270570A12011-11-03
US20150009484A12015-01-08
US20060021787A12006-02-02
Other References:
Y. H. MU ET AL: "Dynamic Error Compensation of Coordinate Measuring Machines for High-Speed Measurement", INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY., vol. 15, no. 11, 1 October 1999 (1999-10-01), LONDON; GB, pages 810 - 814, XP055251088, ISSN: 0268-3768, DOI: 10.1007/s001700050136
Attorney, Agent or Firm:
LESTHAEGHE, David et al. (9830 Sint-Martens-Latem, BE)
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