Title:
METHOD FOR CORRECTING INSPECTING APPARATUS USING CORRECTING JIG, AND INSPECTING APPARATUS HAVING CORRECTING JIG MOUNTED THEREON
Document Type and Number:
WIPO Patent Application WO/2011/089658
Kind Code:
A1
Abstract:
A holding unit fixes a body which is to be inspected and is integrally constituted with a jig. An inspecting unit detects radiation which has passed through the body to be inspected or the jig and generates a transfer image. A shift quantity specifying unit (36) acquires the transfer image of the jig, specifies the feature points of the jig in the transfer image, and calculates the shift quantity of between the feature points of the jig in the transfer image and the center of the entire transfer image. An image capture control unit (40) corrects the positional relationship between the body to be inspected and a radiation detector which obtains the transfer image of the body to be inspected based on the shift quantity.
Inventors:
WADA, Takahiko (4-14-7 Nakanobu, Shinagawa-k, Tokyo 53, 〒1420053, JP)
和田崇彦 (〒53 東京都品川区中延四丁目１４番７号株式会社サキコーポレーション内 Tokyo, 〒1420053, JP)
和田崇彦 (〒53 東京都品川区中延四丁目１４番７号株式会社サキコーポレーション内 Tokyo, 〒1420053, JP)
Application Number:
JP2010/002320
Publication Date:
July 28, 2011
Filing Date:
March 30, 2010
Export Citation:
Assignee:
SAKI CORPORATION (4-14-7, Nakanobu Shinagawa-k, Tokyo 53, 〒1420053, JP)
株式会社サキコーポレーション (〒53 東京都品川区中延四丁目１４番７号 Tokyo, 〒1420053, JP)
WADA, Takahiko (4-14-7 Nakanobu, Shinagawa-k, Tokyo 53, 〒1420053, JP)
株式会社サキコーポレーション (〒53 東京都品川区中延四丁目１４番７号 Tokyo, 〒1420053, JP)
WADA, Takahiko (4-14-7 Nakanobu, Shinagawa-k, Tokyo 53, 〒1420053, JP)
International Classes:
G01N23/04; G01B15/00
Attorney, Agent or Firm:
MORISHITA, Sakaki (2-11-12, Ebisu-Nishi Shibuya-k, Tokyo 21, 〒1500021, JP)
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Claims:
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