Title:
METHOD FOR CORRECTING TILT IN SPECTROSCOPE
Document Type and Number:
WIPO Patent Application WO/2012/056776
Kind Code:
A1
Abstract:
In a coarse adjustment step before spectroscopy, a moving mirror is moved (#11), the outputs of respective split elements of a four-segment sensor which has received an interfering light of a reflected light on the moving mirror and a reflected light on a fixed mirror are added up and the change of contrast of the interfering light is detected (#12), the relative amounts of tilt of the both reflected lights are detected on the basis of the change of the contrast (#13), and an initial tilt error is corrected (#14). In a fine adjustment step before the spectroscopy, on the other hand, the relative amounts of tilt and the relative tilt directions of both of the reflected lights are detected on the basis of the phase difference of the output of each split element of the four-segment sensor which has received the interfering light of both of the reflected lights to correct the initial tilt error.
Inventors:
HARA YOSHIHIRO (JP)
Application Number:
PCT/JP2011/066925
Publication Date:
May 03, 2012
Filing Date:
July 26, 2011
Export Citation:
Assignee:
KONICA MINOLTA HOLDINGS INC (JP)
HARA YOSHIHIRO (JP)
HARA YOSHIHIRO (JP)
International Classes:
G01J3/45
Domestic Patent References:
| WO2009057605A1 | 2009-05-07 | |||
| WO2011058874A1 | 2011-05-19 |
Foreign References:
| JP2004028609A | 2004-01-29 | |||
| JPH07119564B2 | 1995-12-20 | |||
| JP2005169553A | 2005-06-30 | |||
| JPH02280111A | 1990-11-16 | |||
| JP2001194235A | 2001-07-19 | |||
| JP2004028609A | 2004-01-29 |
Other References:
B.M. HOELING ET AL.: "Phase modulation at 125 kHz in a Michelson interferometer using an inexpensive piezoelectric stack driven at resonance", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 72, no. 3, March 2001 (2001-03-01), pages 1630 - 1633, XP012039017
Y.WATANABE ET AL.: "Development of an Electromagnetically Driven Optical MEMS Mirror with Functions of Z-axis Vibration and X,Y Bi-directional Tilting, and an application to Low Coherent Optical Interferometer", PROCEEDINGS OF THE 24TH SENSOR SYMPOSIUM ON SENSORS, MICROMACHINES, AND APPLIED SYSTEMS, 16 October 2007 (2007-10-16), pages 363 - 366, XP008170080
Y.WATANABE ET AL.: "Development of an Electromagnetically Driven Optical MEMS Mirror with Functions of Z-axis Vibration and X,Y Bi-directional Tilting, and an application to Low Coherent Optical Interferometer", PROCEEDINGS OF THE 24TH SENSOR SYMPOSIUM ON SENSORS, MICROMACHINES, AND APPLIED SYSTEMS, 16 October 2007 (2007-10-16), pages 363 - 366, XP008170080
Attorney, Agent or Firm:
SANO SHIZUO (JP)
Shizuo Sano (JP)
Shizuo Sano (JP)
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Claims: