METHOD OF CREATING TEMPLATE FOR MATCHING, AS WELL AS DEVICE FOR CREATING TEMPLATE

WIPO Patent Application WO/2011/013317

A1

Disclosed is a method wherein a template for template matching is created with high accuracy and high efficiency. With respect to each individual pattern constituting a basic circuit, pattern information regarding a plurality of layers in a semiconductor device is memorized in a library. On the basis of the designation of the position and the layer, pattern information regarding the designated position and layer is extracted from the pattern information memorized in the aforementioned library. A template is created on the basis of the above-mentioned pattern information extracted.

MATSUOKA, Ryoichi (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
松岡良一 (〒04 茨城県ひたちなか市大字市毛８８２番地　株式会社　日立ハイテクノロジーズ　那珂事業所内 Ibaraki, 〒3128504, JP)
SUGIYAMA, Akiyuki (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)

JP2010/004588

February 03, 2011

July 15, 2010

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HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社　日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
MATSUOKA, Ryoichi (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
松岡良一 (〒04 茨城県ひたちなか市大字市毛８８２番地　株式会社　日立ハイテクノロジーズ　那珂事業所内 Ibaraki, 〒3128504, JP)

G01B15/04; G01N23/225; H01L21/66

INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)

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