Title:
METHOD FOR CRYSTALLIZATION OF METAL OXIDE THIN FILM BY USING THERMAL DISSIPATION ANNEALING
Document Type and Number:
WIPO Patent Application WO/2023/038251
Kind Code:
A1
Abstract:
The present invention relates to a method for crystallization of a metal oxide thin film by using thermal dissipation annealing (TDA), and exhibits an effect enabling high-temperature thermal annealing, which is essential for the performance improvement of a semiconductor material, a sensor material, and the like deposited on a thin-plate substrate, even without degrading the performance of the thin-plate substrate. In addition, a metal oxide thin film prepared by the method of the present invention is in the form of a two-dimensional nanosheet, and thus may have a low defect density (high crystallinity) and a wide surface area. Accordingly, based on the improved photosensitivity and photoreactivity, the metal oxide thin film may be utilized in a high-performance photoelectric device.
Inventors:
LEE JEWON (KR)
LEEM JAE-YOUNG (KR)
KIM DONGWAN (KR)
LEEM JAE-YOUNG (KR)
KIM DONGWAN (KR)
Application Number:
PCT/KR2022/009339
Publication Date:
March 16, 2023
Filing Date:
June 29, 2022
Export Citation:
Assignee:
UNIV INJE IND ACAD COOP FOUND (KR)
International Classes:
H01L21/02; H01L21/67
Foreign References:
| KR20140128132A | 2014-11-05 |
Other References:
KIM DONGWAN, JO EUIJE, LEEM JAE-YOUNG: "Thermal Dissipation Annealing for Crystallization of In‐Doped ZnO Films Deposited on Polyethylene Naphthalate Substrate without Substrate Deformation", PHYSICA STATUS SOLIDI. A: APPLICATIONS AND MATERIALS SCIENCE, WILEY - V C H VERLAG GMBH & CO. KGAA, DE, vol. 218, no. 16, 1 August 2021 (2021-08-01), DE , pages 2000698, XP093046442, ISSN: 1862-6300, DOI: 10.1002/pssa.202000698
KIM DONGWAN, LEEM JAE-YOUNG: "Transparent and flexible ZnO nanorods induced by thermal dissipation annealing without polymer substrate deformation for next-generation wearable devices", RSC ADVANCES, vol. 11, no. 29, 13 May 2021 (2021-05-13), pages 17538 - 17546, XP093046447, DOI: 10.1039/D1RA02578C
KIM DONGWAN, LEEM JAE-YOUNG: "Crystallization of ZnO thin films without polymer substrate deformation via thermal dissipation annealing method for next generation wearable devices", RSC ADVANCES, vol. 11, no. 2, 4 January 2021 (2021-01-04), pages 876 - 882, XP093046450, DOI: 10.1039/D0RA09869H
KIM DONGWAN, LEEM JAE-YOUNG: "Crystallization of ZnO thin films via thermal dissipation annealing method for high-performance UV photodetector with ultrahigh response speed", SCIENTIFIC REPORTS, vol. 11, no. 1, XP093046451, DOI: 10.1038/s41598-020-79849-z
KIM DONGWAN, LEEM JAE-YOUNG: "Transparent and flexible ZnO nanorods induced by thermal dissipation annealing without polymer substrate deformation for next-generation wearable devices", RSC ADVANCES, vol. 11, no. 29, 13 May 2021 (2021-05-13), pages 17538 - 17546, XP093046447, DOI: 10.1039/D1RA02578C
KIM DONGWAN, LEEM JAE-YOUNG: "Crystallization of ZnO thin films without polymer substrate deformation via thermal dissipation annealing method for next generation wearable devices", RSC ADVANCES, vol. 11, no. 2, 4 January 2021 (2021-01-04), pages 876 - 882, XP093046450, DOI: 10.1039/D0RA09869H
KIM DONGWAN, LEEM JAE-YOUNG: "Crystallization of ZnO thin films via thermal dissipation annealing method for high-performance UV photodetector with ultrahigh response speed", SCIENTIFIC REPORTS, vol. 11, no. 1, XP093046451, DOI: 10.1038/s41598-020-79849-z
Attorney, Agent or Firm:
WIE, Byoung-Gap (KR)
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