Title:
METHOD FOR DECOMPOSING QUARTZ SAMPLE, METHOD FOR ANALYZING METAL CONTAMINATION OF QUARTZ SAMPLE, AND METHOD FOR MANUFACTURING QUARTZ MEMBER
Document Type and Number:
WIPO Patent Application WO/2018/123490
Kind Code:
A1
Abstract:
Provided is a method for decomposing a quartz sample, including decomposing at least a portion of the quartz sample by bringing a liquid in which at least a portion of a quartz sample as an analysis object is immersed into contact with a gas generated from a mixed acid, the liquid including at least water, the mixed acid being a mixture of hydrogen fluoride and sulfuric acid, and the molar fraction of sulfuric acid in the mixed acid being in the range of 0.07-0.40.
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Inventors:
KATO HIROKAZU (JP)
MURAMATSU TAKASHI (JP)
MURAMATSU TAKASHI (JP)
Application Number:
PCT/JP2017/043899
Publication Date:
July 05, 2018
Filing Date:
December 07, 2017
Export Citation:
Assignee:
SUMCO CORP (JP)
International Classes:
G01N1/28; C30B29/06; G01N31/00
Foreign References:
| JPH11183342A | 1999-07-09 | |||
| JP2012069855A | 2012-04-05 |
Attorney, Agent or Firm:
SIKS & CO. (JP)
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