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Title:
METHOD FOR DECOMPOSING QUARTZ SAMPLE, METHOD FOR ANALYZING METAL CONTAMINATION OF QUARTZ SAMPLE, AND METHOD FOR MANUFACTURING QUARTZ MEMBER
Document Type and Number:
WIPO Patent Application WO/2018/123490
Kind Code:
A1
Abstract:
Provided is a method for decomposing a quartz sample, including decomposing at least a portion of the quartz sample by bringing a liquid in which at least a portion of a quartz sample as an analysis object is immersed into contact with a gas generated from a mixed acid, the liquid including at least water, the mixed acid being a mixture of hydrogen fluoride and sulfuric acid, and the molar fraction of sulfuric acid in the mixed acid being in the range of 0.07-0.40.

Inventors:
KATO Hirokazu (1-2-1 Shibaura Minato-k, Tokyo 34, 〒1058634, JP)
MURAMATSU Takashi (1-2-1 Shibaura Minato-k, Tokyo 34, 〒1058634, JP)
Application Number:
JP2017/043899
Publication Date:
July 05, 2018
Filing Date:
December 07, 2017
Export Citation:
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Assignee:
SUMCO CORPORATION (1-2-1 Shibaura, Minato-ku Tokyo, 34, 〒1058634, JP)
International Classes:
G01N1/28; C30B29/06; G01N31/00
Attorney, Agent or Firm:
SIKS & CO. (8th Floor, Kyobashi-Nisshoku Bldg. 8-7, Kyobashi 1-chome, Chuo-k, Tokyo 31, 〒1040031, JP)
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