Title:
METHOD FOR DEFECT INSPECTION AND APPARATUS FOR DEFECT INSPECTION
Document Type and Number:
WIPO Patent Application WO/2011/068056
Kind Code:
A1
Abstract:
Provided is a technique for a wafer inspection conducted by simple operation, which is useful even when the inspection covers a variety of items and the inspection items are changed frequently with time like in a start-up period of a semi-conductor process. According to the technique, inspection images are collected, and then a template is prepared from the inspection images. A plurality of regions are defined on the template, and inspection methods and output indexes are registered in correspondence with the respective regions. In the inspection, by reference to the template images corresponding to the derived inspection images, the inspection is conducted based on the inspection information registered therein and the quantitative output levels are calculated.
Inventors:
NAKAGAKI Ryo (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
中垣 亮 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
HARADA Minoru (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
原田 実 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
中垣 亮 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
HARADA Minoru (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
原田 実 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
Application Number:
JP2010/070819
Publication Date:
June 09, 2011
Filing Date:
November 22, 2010
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
NAKAGAKI Ryo (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
中垣 亮 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
HARADA Minoru (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
NAKAGAKI Ryo (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
中垣 亮 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
HARADA Minoru (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
International Classes:
H01L21/66; G01B15/08; G01N23/225; H01J37/22
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
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