Title:
METHOD FOR DEPOSITING OXIDE FILMS ON TEXTURED METAL PIPES
Document Type and Number:
WIPO Patent Application WO/2010/076428
Kind Code:
A8
Abstract:
The invention relates to a method for depositing an epitaxial metal oxide buffer layer onto the functionalised surface of a textured metal substrate, said method including the following steps: (1) depositing a layer of an A2-XB2+XO7 oxide precursor, where A is a metal having a valence of 3 or a mixture of a plurality of such metals, and B is a metal having a valence of 4, and x is a number between –0.1 and +0.1, from a solution of carboxylates of said metals A and B; (2) letting the oxide precursor layer dry; (3) carrying out a thermal processing so as to pyrolyse said oxide precursor and so as to form the oxide, at least a portion of said thermal processing being carried out under a reduction gas scanning.
Inventors:
ODIER PHILIPPE (FR)
MORLENS STEPHANIE (FR)
MILLON CYRIL (FR)
CAROFF TRISTAN (FR)
JIMENEZ CARMEN (FR)
SOUBEYROUX JEAN-LOUIS (FR)
ALLAIS ARNAUD (FR)
RIKEL MARK (DE)
MORLENS STEPHANIE (FR)
MILLON CYRIL (FR)
CAROFF TRISTAN (FR)
JIMENEZ CARMEN (FR)
SOUBEYROUX JEAN-LOUIS (FR)
ALLAIS ARNAUD (FR)
RIKEL MARK (DE)
Application Number:
PCT/FR2009/001448
Publication Date:
November 18, 2010
Filing Date:
December 18, 2009
Export Citation:
Assignee:
CENTRE NAT RECH SCIENT (FR)
ODIER PHILIPPE (FR)
MORLENS STEPHANIE (FR)
MILLON CYRIL (FR)
CAROFF TRISTAN (FR)
JIMENEZ CARMEN (FR)
SOUBEYROUX JEAN-LOUIS (FR)
ALLAIS ARNAUD (FR)
RIKEL MARK (DE)
ODIER PHILIPPE (FR)
MORLENS STEPHANIE (FR)
MILLON CYRIL (FR)
CAROFF TRISTAN (FR)
JIMENEZ CARMEN (FR)
SOUBEYROUX JEAN-LOUIS (FR)
ALLAIS ARNAUD (FR)
RIKEL MARK (DE)
International Classes:
H01L39/24
Attorney, Agent or Firm:
SCHMIDT, Martin, Peter (15 rue Emile Zola, Lyon, FR)
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