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Title:
METHOD FOR DEPOSITING PROTECTION FILM OF LIGHT-EMITTING ELEMENT
Document Type and Number:
WIPO Patent Application WO/2017/200254
Kind Code:
A1
Abstract:
The present invention relates to a method for depositing a protection film of a light-emitting element, the method comprising the steps of: depositing a first inorganic protection film on a light-emitting element of a substrate; and depositing a second inorganic protection film, having comparatively smaller internal stress than the first inorganic protection film, on the first inorganic protection film.

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Inventors:
LEE HONG-JAE (KR)
KIM JONG-HWAN (KR)
SHIM WOO-PIL (KR)
LEE WOO-JIN (KR)
YOON SUNG-YEAN (KR)
LEE DON-HEE (KR)
Application Number:
PCT/KR2017/005042
Publication Date:
November 23, 2017
Filing Date:
May 16, 2017
Export Citation:
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Assignee:
TES CO LTD (KR)
International Classes:
H01L51/52; H01L21/02; H01L51/56
Foreign References:
KR20120109083A2012-10-08
KR20150049990A2015-05-08
KR20140087470A2014-07-09
KR20140140524A2014-12-09
KR20130117510A2013-10-28
Attorney, Agent or Firm:
LEE, Jae-Hong (KR)
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