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Title:
METHOD FOR DESIGNING AND MANUFACTURING HIGH-SENSITIVITY PIEZORESISTIVE SENSOR BY MEANS OF MULTI-LEVEL STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2019/076079
Kind Code:
A1
Abstract:
Disclosed is a method for designing and manufacturing a high-sensitivity piezoresistive sensor by means of a multi-level structure. The method comprises the following steps: forming, on a substrate, a first-level basic geometrical unit composed of basic structural units, wherein the first-level basic geometrical unit is a two-dimensional or a three-dimensional network structure formed by stacking several basic structural units; combining the several first-level basic geometrical units by means of array stacking to form a second-level geometrical structure, and forming a contact connection area between adjacent first-level basic geometrical units; and dispensing a conductive adhesive on at least two points on the substrate, thereby forming electrodes of a piezoresistive sensor so as to acquire a piezoresistive sensor. The high-sensitivity piezoresistive sensor acquired according to the method in the present invention has the advantages of flexibility in design, being simple and convenient in terms of manufacturing, and good in terms of universality as same may be easily combined with existing sensor manufacturing methods.

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Inventors:
LIU TAO (US)
DUAN XIAOSHUANG (CN)
LUO JIANGJIANG (CN)
YAO YANBO (CN)
Application Number:
PCT/CN2018/093045
Publication Date:
April 25, 2019
Filing Date:
June 27, 2018
Export Citation:
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Assignee:
UNIV SOOCHOW (CN)
International Classes:
G01D5/16; G01L1/18
Foreign References:
CN107990918A2018-05-04
CN106932128A2017-07-07
CN107003190A2017-08-01
US20160153762A12016-06-02
Other References:
DUAN, XIAOSHUANG ET AL.: "A Route toward Ultrasensitive Layered Carbon Based Piezoresistive Sensors through Hierarchical Contact Design", ACS APPLIED MATERIALS & INTERFACES, vol. 9, no. 49, 20 November 2017 (2017-11-20), pages 43133 - 43142, XP055593362, ISSN: 1944-8244, DOI: 10.1021/acsami.7b14495
Attorney, Agent or Firm:
CENTRAL SOUTH WELL INTELLECTUAL PROPERTY OFFICE (CN)
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