Title:
METHOD FOR DESIGNING VACUUM SYSTEM, METHOD FOR SELECTING OPTIMAL PUMP CAPACITY WHEN DESIGNING VACUUM SYSTEM, AND METHOD FOR DISPLAYING DESIGN SCREEN OF VACUUM SYSTEM AND APPARATUS THEREFOR
Document Type and Number:
WIPO Patent Application WO/2022/034988
Kind Code:
A1
Abstract:
A method for designing a vacuum system including a chamber, a pipe, and a pump according to one embodiment of the present invention for achieving the aforementioned problem, comprises the steps of: (a) setting process conditions, according to a user input, of a first vacuum system disposed in a virtual region, the process conditions including the starting pressure of a chamber, the target pressure thereof, and the time to reach the target pressure thereof and including at least one of a process pressure at a maximum gas load (or flow), a gas load at the maximum process pressure, and a gas load at a minimum process pressure; (b) simulating operations of the first vacuum system on the basis of specifications of the chamber, the pipe, and the pump; and (c) providing the set process conditions and results of the simulation.
Inventors:
KANG TAE OOK (KR)
Application Number:
PCT/KR2020/017741
Publication Date:
February 17, 2022
Filing Date:
December 07, 2020
Export Citation:
Assignee:
KANG TAE OOK (KR)
International Classes:
G06F30/20; G06F30/18; G06F111/20; G06F113/14
Foreign References:
| KR100905235B1 | 2009-07-01 | |||
| KR101923691B1 | 2019-02-27 | |||
| KR20180105520A | 2018-09-28 | |||
| KR101990995B1 | 2019-09-30 | |||
| KR20190005850A | 2019-01-16 |
Attorney, Agent or Firm:
OAM PATENT & TRADEMARK LAW FIRM (KR)
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