Title:
METHOD FOR DETECTING ABNORMAL TERMINAL OF CARRIER
Document Type and Number:
WIPO Patent Application WO/2020/107745
Kind Code:
A1
Abstract:
A method for detecting an abnormal terminal of a carrier (1). The carrier (1) comprises a plurality of circular areas (10A, 10B), and each of the circular areas (10A, 10B) is provided with a plurality of terminals (12A, 12B) for carrying a substrate. The method comprises: placing a substrate on a plurality of terminals (12A, 12B) of a carrier (1); then, measuring values of forces received by the plurality of terminals (12A, 12B) when carrying the substrate; and then comparing the values of forces received by the plurality of terminals (12A, 12B) in a same circular area (10A, 10B) to detect an abnormal terminal corresponding to each circular area (10A, 10B).
Inventors:
DONG MINGJUN (CN)
Application Number:
PCT/CN2019/077963
Publication Date:
June 04, 2020
Filing Date:
March 13, 2019
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
G01M13/00
Foreign References:
| CN203833166U | 2014-09-17 | |||
| KR20140085940A | 2014-07-08 | |||
| CN104215638A | 2014-12-17 | |||
| EP1496342A1 | 2005-01-12 | |||
| CN203942703U | 2014-11-12 |
Attorney, Agent or Firm:
ESSEN PATENT&TRADEMARK AGENCY (CN)
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