Title:
METHOD OF DETECTING ABNORMALITY IN FLUID SUPPLY SYSTEM, USING FLOW RATE CONTROL DEVICE HAVING PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2007/026902
Kind Code:
A1
Abstract:
Abnormalities such as operational malfunction and seat leakage of valves assembled in
a fluid supply system using a flow rate control device can be simply, quickly, and
accurately checked without removing them from a pile line of the fluid supply system
with the use of a function of the flow rate control device having a pressure sensor.
In the fluid supply system having the flow rate control device provided with the
pressure sensor that has a flow rate setting mechanism, and a flow rate/pressure display
mechanism and/or a flow rate self-diagnosis mechanism, an abnormality of the
flow rate control device and a control device on the upstream side or downstream side
of the flow rate control device is detected using a pressure display value of the
flow rate control device and/or a diagnosis value of the flow rate self-diagnosis mechanism.
Inventors:
NAGASE MASAAKI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
HIRATA KAORU (JP)
SUGITA KATSUYUKI (JP)
MATSUMOTO ATSUSHI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
HIRATA KAORU (JP)
SUGITA KATSUYUKI (JP)
MATSUMOTO ATSUSHI (JP)
Application Number:
PCT/JP2006/317390
Publication Date:
March 08, 2007
Filing Date:
August 28, 2006
Export Citation:
Assignee:
FUJIKIN KK (JP)
NAGASE MASAAKI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
HIRATA KAORU (JP)
SUGITA KATSUYUKI (JP)
MATSUMOTO ATSUSHI (JP)
NAGASE MASAAKI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
HIRATA KAORU (JP)
SUGITA KATSUYUKI (JP)
MATSUMOTO ATSUSHI (JP)
International Classes:
G05D7/06; G01F1/00; G01F1/42; G01M3/04
Foreign References:
| JP2001147722A | 2001-05-29 | |||
| JPH09184600A | 1997-07-15 |
Attorney, Agent or Firm:
SUGIMOTO, Takeo (1-21 Kitahama 2-chome, Chuo-ku, Osaka-sh, Osaka 41, JP)
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