Title:
METHOD FOR DETECTING AMOUNT OF PROCESSING AND PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/119585
Kind Code:
A1
Abstract:
In order to provide a technology by which an amount of processing, such as an amount of abrading, can be detected without wire bonding, an abrasive apparatus is provided with a capacity (5) formed on an abrasion target (2) by a conductive pattern a volume of which is varied by abrasion, and an abrasion target side inductor (4) formed by a conductive pattern; and the capacity (5) and the abrasion target side inductor (4) constitute an LC resonator. A detection side inductor (3) is formed by a conductive pattern on a detection substrate (1) which is connected to an abrasion amount detector (7). Through electromagnetic coupling of the abrasion target side inductor (4) and the detection side inductor (3), impedance viewed from the detection side to the abrasion target side is RF-detected. The capacity (5) on the abrasion target (2) is varied by abrading, and in accordance therewith, resonance frequency variation quantity of the LC resonator is monitored by the abrasion amount detector (7), to thereby calculate the abrasion amount.
Inventors:
MIMA, Akira (Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
三間 彬 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
NAMBA, Akihiro (Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
難波 明博 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
SUGA, Takashi (Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
三間 彬 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
NAMBA, Akihiro (Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
難波 明博 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
SUGA, Takashi (Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
Application Number:
JP2009/069420
Publication Date:
October 21, 2010
Filing Date:
November 16, 2009
Export Citation:
Assignee:
HITACHI, LTD. (6-6 Marunouchi 1-chome, Chiyoda-ku Tokyo, 80, 〒1008280, JP)
株式会社日立製作所 (〒80 東京都千代田区丸の内一丁目６番６号 Tokyo, 〒1008280, JP)
MIMA, Akira (Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
三間 彬 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
NAMBA, Akihiro (Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
難波 明博 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
株式会社日立製作所 (〒80 東京都千代田区丸の内一丁目６番６号 Tokyo, 〒1008280, JP)
MIMA, Akira (Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
三間 彬 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
NAMBA, Akihiro (Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
難波 明博 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
International Classes:
G11B5/31; B24B37/04; B24B49/02; B24B49/10
Attorney, Agent or Firm:
TSUTSUI, Yamato (Tsutsui & Associates, 3F Shinjuku Gyoen Bldg. 3-10, Shinjuku 2-chome, Shinjuku-k, Tokyo 22, 〒1600022, JP)
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