Title:
METHOD FOR DETECTING INTERFACIAL FRICTIONAL CHEMICAL REACTION BETWEEN ABRASIVE GRAINS AND DIAMOND WAFER SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2022/199193
Kind Code:
A1
Abstract:
Disclosed is a method for detecting the interfacial frictional chemical reaction between active metal or metal oxide abrasive grains and a diamond wafer substrate, in which a layer of active metal abrasive grains or a metal oxide shell layer having uniform and controllable thickness is coated on the surface of a diamond indenter for a nanoindentation scratch tester by means of magnetron sputtering, and the interfacial interaction relationship between the abrasive grains and the wafer is controlled by means of a scratch experiment with the diamond wafer substrate, and then the chemical components in the interaction region of the diamond wafer substrate surface are detected by a scanning probe micro-Raman spectrometer, so as to clearly determine the mechanism of the interfacial frictional chemical reaction between the active abrasive grains and the wafer substrate. The method is simple to operate and has good application prospects in the field of high-efficient ultra-precision processing of semiconductor wafer substrates.
Inventors:
XU XIPENG (CN)
LU JING (CN)
LUO QIUFA (CN)
WU YUEQIN (CN)
MU DEKUI (CN)
XUE ZHIPING (CN)
LU JING (CN)
LUO QIUFA (CN)
WU YUEQIN (CN)
MU DEKUI (CN)
XUE ZHIPING (CN)
Application Number:
PCT/CN2021/143449
Publication Date:
September 29, 2022
Filing Date:
December 31, 2021
Export Citation:
Assignee:
UNIV HUAQIAO (CN)
International Classes:
G01N21/65; G01N1/28
Foreign References:
| CN101368012A | 2009-02-18 | |||
| CN102719220A | 2012-10-10 | |||
| CN104962234A | 2015-10-07 | |||
| JP2002283243A | 2002-10-03 | |||
| CN101314211A | 2008-12-03 |
Other References:
ZHANG, BAOSEN: "Formation and Mechanical Properties of in Situ Tribo-chemical Reaction Film on Surface of 45 Steel", TRANSACTIONS OF MATERIALS AND HEAT TREATMENT, vol. 32, no. 1, 2 January 2011 (2011-01-02), pages 1 - 5, XP055970044, DOI: 10.13289/j.issn.1009-6264.2011.01.017
YU, NENGYUE: "Study on Interfacial Bonding Strength of Diamond Abrasive in Flexible Polishing Tools", MASTER THESIS, TIANJIN POLYTECHNIC UNIVERSITY, CN, 15 January 2020 (2020-01-15), CN , pages 1 - 76, XP055970041, ISSN: 1674-0246
YU, NENGYUE: "Study on Interfacial Bonding Strength of Diamond Abrasive in Flexible Polishing Tools", MASTER THESIS, TIANJIN POLYTECHNIC UNIVERSITY, CN, 15 January 2020 (2020-01-15), CN , pages 1 - 76, XP055970041, ISSN: 1674-0246
Attorney, Agent or Firm:
SHOUCHUANG JUNHE PATENT AGENT CO., LTD.XIAMEN (CN)
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