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Title:
METHOD FOR DETECTING OXIGEN, METHOD FOR DETERMINING AIR LEAKAGE, GAS COMPONENT DETECTOR, AND VACUUM PROCESSOR
Document Type and Number:
WIPO Patent Application WO/2010/106792
Kind Code:
A1
Abstract:
A method for detecting oxygen, wherein a grid (102), an ion collector (103), and a filament (101), on the surface of the metal of which an oxide is formed are prepared, the filament current flowing through the filament (101) is controlled in such a manner that an emission current becomes constant, thermo electrons are emitted by heat generation due to the energization of the filament current, ions are generated by ionizing gas, the ions are captured by the ion collector (103), and the oxygen present within a vacuum processing chamber is detected by measuring the value of the filament current.

Inventors:
NAKAJIMA, Toyoaki (Inc. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中島豊昭 (〒43 神奈川県茅ヶ崎市萩園2500 株式会社アルバック内 Kanagawa, 〒2538543, JP)
MIYASHITA, Takeshi (Inc. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
宮下剛 (〒43 神奈川県茅ヶ崎市萩園2500 株式会社アルバック内 Kanagawa, 〒2538543, JP)
NAGATA, Yasushi (Inc. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
Application Number:
JP2010/001860
Publication Date:
September 23, 2010
Filing Date:
March 16, 2010
Export Citation:
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Assignee:
ULVAC, Inc. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園2500 Kanagawa, 〒2538543, JP)
NAKAJIMA, Toyoaki (Inc. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中島豊昭 (〒43 神奈川県茅ヶ崎市萩園2500 株式会社アルバック内 Kanagawa, 〒2538543, JP)
MIYASHITA, Takeshi (Inc. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
宮下剛 (〒43 神奈川県茅ヶ崎市萩園2500 株式会社アルバック内 Kanagawa, 〒2538543, JP)
International Classes:
G01N27/66; G01L21/32; G01M3/00
Domestic Patent References:
2008-11-06
2008-01-24
Foreign References:
JP2003185635A2003-07-03
JPS60202649A1985-10-14
JPH10213508A1998-08-11
JPS6410143A1989-01-13
JPH06308088A1994-11-04
JP2001273869A2001-10-05
JP2005114388A2005-04-28
JP2005259606A2005-09-22
Attorney, Agent or Firm:
SHIGA, Masatake et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
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