Title:
METHOD FOR DETECTION OF OVERSIZED SUB-RESOLUTION ASSIST FEATURES
Document Type and Number:
WIPO Patent Application WO/2010/005700
Kind Code:
A3
Abstract:
Disclosed are methods and apparatus for inspecting a sub-resolution assist features (SRAF) on a reticle. A test flux measurement for a boundary area that encompasses a width and a length portion of a test SRAF is determined, and at least one reference flux measurement for one or more boundary areas of one or more reference SRAF's is determined. The test flux measurement is compared with the reference flux measurements. The comparison is used to then determine whether the test SRAF is undersized or oversized. If the test SRAF is determined to be oversized, it may then be determined whether the test SRAF is defective based on the comparison using a first threshold.
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Inventors:
HESS CARL E (US)
XIONG YALIN (US)
XIONG YALIN (US)
Application Number:
PCT/US2009/047357
Publication Date:
March 04, 2010
Filing Date:
June 15, 2009
Export Citation:
Assignee:
KLA TENCOR CORP (US)
HESS CARL E (US)
XIONG YALIN (US)
HESS CARL E (US)
XIONG YALIN (US)
International Classes:
H01L21/66; H01L21/027
Foreign References:
| US20080034343A1 | 2008-02-07 | |||
| US20070292777A1 | 2007-12-20 | |||
| US6526164B1 | 2003-02-25 | |||
| US20080063948A1 | 2008-03-13 |
Attorney, Agent or Firm:
MCANDREWS, Kevin (Legal DepartmentOne Technology Driv, Milpitas California, US)
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