Title:
METHOD FOR DETERMINING CONFIGURATION OF SURFACE DEFECT INSPECTION DEVICE, CONFIGURATION DETERMINATION DEVICE, CONFIGURATION DETERMINATION PROGRAM, AND RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2018/225406
Kind Code:
A1
Abstract:
In the present invention, the respective placement positions and optical axis directions of an illumination unit and imaging unit are set as first and second configuration information; arithmetic is carried out to determine an image that would be obtained by illuminating the object of inspection including a defect using the illumination unit according to the first configuration information and imaging an inspection area using the imaging unit according to the second configuration information, on the basis of information quantifying the illumination unit, imaging unit, and the appearance of the object of inspection; and the defect is detected on the basis of the image. The present invention repeatedly carries out the above processing while changing at least one from among the first and second configuration information and determines the first and second configuration information with the best detection result as the optimal configuration.
Inventors:
KASHIHARA MASATO (JP)
WAKIMURA TAIZO (JP)
WAKIMURA TAIZO (JP)
Application Number:
PCT/JP2018/016391
Publication Date:
December 13, 2018
Filing Date:
April 23, 2018
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
G01N21/88; G01B11/30; G03B15/00; H04N5/225; H04N7/18
Foreign References:
| JP2005030848A | 2005-02-03 | |||
| JPH09318337A | 1997-12-12 | |||
| JP2015081826A | 2015-04-27 | |||
| JP2013072788A | 2013-04-22 | |||
| JP2010243283A | 2010-10-28 | |||
| JP2002148195A | 2002-05-22 |
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
Download PDF:
Previous Patent: GEL SHEET MASK WITH METALLIC OCCLUSIVE LAYER
Next Patent: PRESSED POSITION DETECTION SENSOR AND ELECTRONIC APPARATUS
Next Patent: PRESSED POSITION DETECTION SENSOR AND ELECTRONIC APPARATUS