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Title:
METHOD FOR DETERMINING METAL MASK PLATE DEFECT AND MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/023890
Kind Code:
A1
Abstract:
A method for determining a metal mask plate (700) defect and a manufacturing device (100) used for determining a metal mask plate (700) defect. The metal mask plate (700) is adapted to be attached to a pixel substrate (800) so as to assist the pixel substrate (800) in forming multiple substrate pixel points (820). The determining method comprises steps of: (S112) obtaining an image of the metal mask plate (700), the image comprising an image pixel point; (S114) in the same reference coordinate system, establishing a position relationship between the image pixel point and the substrate pixel point (820); (S116) testing the substrate pixel point (820) so as to determine whether the substrate pixel point (820) is abnormal, and obtaining the coordinate position of the abnormal substrate pixel point (820); and (S118) determining a defect position of the metal mask plate (700) according to the coordinate position of the abnormal substrate pixel point (820) and the position relationship.

Inventors:
ZHANG, Yaoyu (Building #43, Dayun Software TownNo. 8288 Longgang Road, Henggang Street,Longgang Distric, Shenzhen Guangdong 2, 518052, CN)
WANG, Tong (Building #43, Dayun Software TownNo. 8288 Longgang Road, Henggang Street,Longgang Distric, Shenzhen Guangdong 2, 518052, CN)
KANG, Hui (Building #43, Dayun Software TownNo. 8288 Longgang Road, Henggang Street,Longgang Distric, Shenzhen Guangdong 2, 518052, CN)
Application Number:
CN2017/095296
Publication Date:
February 07, 2019
Filing Date:
July 31, 2017
Export Citation:
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Assignee:
SHENZHEN ROYOLE TECHNOLOGIES CO., LTD. (Building #43, Dayun Software TownNo. 8288 Longgang Road, Henggang Street,Longgang Distric, Shenzhen Guangdong 2, 518052, CN)
International Classes:
G03F1/00; H01L21/66; H01L51/56
Attorney, Agent or Firm:
TSINGYIHUA INTELLECTUAL PROPERTY LLC (Room 301 Trade Building, Zhaolanyuan Tsinghua University,Qinghuayuan, Haidian District, Beijing 4, 100084, CN)
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