METHOD OF DETERMINING MULTILAYER THIN FILM DEPOSITION ON A PIEZOELECTRIC CRYSTAL

Title:

METHOD OF DETERMINING MULTILAYER THIN FILM DEPOSITION ON A PIEZOELECTRIC CRYSTAL

Document Type and Number:

WIPO Patent Application WO/2012/106609

Kind Code:

A3

Abstract:

A method for accurately calculating the thickness of deposited thin film layers onto a piezoelectric crystal blank in which dissimilar materials can be utilized, enabling determinations for various applications employing exotic materials. Additionally, the specific acoustic impedance (or equivalent z-ratio) of an unknown deposited material can be determined. The exact analytical solution nearly eliminates thickness errors when several layers of different materials are sequentially deposited on the same monitor quartz crystal.

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Inventors:

WAJID ABDUL (US)

Application Number:

PCT/US2012/023793

Publication Date:

December 27, 2012

Filing Date:

February 03, 2012

Export Citation:

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Assignee:

INFICON INC (US)
WAJID ABDUL (US)

International Classes:

H01L41/22; G01B17/02

Domestic Patent References:

WO2007140943A1

2007-12-13

Foreign References:

US5936150A	1999-08-10
US20020152803A1	2002-10-24
US5873154A	1999-02-23
US7579761B2	2009-08-25

Attorney, Agent or Firm:

BILINSKI, Peter J. et al. (LLPOne Park Place, 300 South State Stree, Syracuse NY, US)

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