METHOD FOR DETERMINING QUALITY OF SILICON BLOCKS, PROGRAM FOR DETERMINING QUALITY OF SILICON BLOCKS, AND METHOD FOR PRODUCING SILICON MONOCRYSTAL

Title:

METHOD FOR DETERMINING QUALITY OF SILICON BLOCKS, PROGRAM FOR DETERMINING QUALITY OF SILICON BLOCKS, AND METHOD FOR PRODUCING SILICON MONOCRYSTAL

Document Type and Number:

WIPO Patent Application WO/2019/087469

Kind Code:

A1

Abstract:

This method for determining the quality of silicon blocks is designed to determine the quality of a plurality of silicon blocks cut from a silicon monocrystal pulled by the Czochralski method, and comprises: a stage (S2) of acquiring quality evaluation results of sample wafers cut from end portions of the plurality of silicon blocks; a stage (S3) of acquiring pulling record data of the silicon monocrystal; a stage (S6, S7) of setting a pulling management margin for each silicon block on the basis of the quality evaluation results for each sample wafer; and a stage (S8, S9) of collating the acquired pulling record data and the set pulling management margin and determining the quality of each silicon block.

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Inventors:

SAITO YASUHIRO (JP)
KUDO SATOSHI (JP)
KURAGAKI SHUNJI (JP)
KIM TEGI (JP)

Application Number:

PCT/JP2018/026099

Publication Date:

May 09, 2019

Filing Date:

July 10, 2018

Export Citation:

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Assignee:

SUMCO CORP (JP)

International Classes:

C30B29/06; C30B15/20; H01L21/66

Foreign References:

JP2006045007A	2006-02-16
JP2010116271A	2010-05-27
JP2011219319A	2011-11-04
JP2006225194A	2006-08-31
JP2007261935A	2007-10-11