Title:
METHOD FOR DETERMINING A SUBSTRATE POSITION IN A CLOSED CHAMBER AND APPARATUS FOR PERFORMING THE METHOD
Document Type and Number:
WIPO Patent Application WO/2019/104648
Kind Code:
A1
Abstract:
A method and an apparatus for determining the position of a substrate within a closed chamber are provided, wherein the substrate moved within the chamber by a transport system comprising at least one rotating shaft. A load-converting element is provided adjacent to at least one of the rotating shafts, wherein the load-converting element detecting a load acting on the at least one rotating shaft and converting it into an electrical parameter. While no substrate is present on the at least one rotating shaft, a first output signal corresponding to a first value of the electrical parameter is measured. The output signal is then monitored and a presence of the substrate on the at least one rotating shaft is detected when the output signal differs from the first output signal by at least a predetermined amount.
Inventors:
PENG SHOU (CN)
HARR MICHAEL (DE)
YIN XINJIAN (CN)
FU GANHUA (DE)
KRAFT CHRISTIAN (DE)
RAU STEFAN (DE)
SIEPCHEN BASTIAN (DE)
HARR MICHAEL (DE)
YIN XINJIAN (CN)
FU GANHUA (DE)
KRAFT CHRISTIAN (DE)
RAU STEFAN (DE)
SIEPCHEN BASTIAN (DE)
Application Number:
PCT/CN2017/113973
Publication Date:
June 06, 2019
Filing Date:
November 30, 2017
Export Citation:
Assignee:
CHINA TRIUMPH INT ENG CO LTD (CN)
CTF SOLAR GMBH (DE)
CTF SOLAR GMBH (DE)
International Classes:
B65G47/54; B65G49/06
Domestic Patent References:
WO2017151368A1 | 2017-09-08 |
Foreign References:
CN103787027A | 2014-05-14 | |||
CN103787067A | 2014-05-14 | |||
CN106516738A | 2017-03-22 | |||
CN101988191A | 2011-03-23 | |||
CN107210258A | 2017-09-26 | |||
CN105679698A | 2016-06-15 | |||
US20130206065A1 | 2013-08-15 | |||
CN103787027A | 2014-05-14 |
Other References:
See also references of EP 3717385A4
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
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