Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR DETERMINING A SUBSTRATE POSITION IN A CLOSED CHAMBER AND APPARATUS FOR PERFORMING THE METHOD
Document Type and Number:
WIPO Patent Application WO/2019/104648
Kind Code:
A1
Abstract:
A method and an apparatus for determining the position of a substrate within a closed chamber are provided, wherein the substrate moved within the chamber by a transport system comprising at least one rotating shaft. A load-converting element is provided adjacent to at least one of the rotating shafts, wherein the load-converting element detecting a load acting on the at least one rotating shaft and converting it into an electrical parameter. While no substrate is present on the at least one rotating shaft, a first output signal corresponding to a first value of the electrical parameter is measured. The output signal is then monitored and a presence of the substrate on the at least one rotating shaft is detected when the output signal differs from the first output signal by at least a predetermined amount.

Inventors:
PENG SHOU (CN)
HARR MICHAEL (DE)
YIN XINJIAN (CN)
FU GANHUA (DE)
KRAFT CHRISTIAN (DE)
RAU STEFAN (DE)
SIEPCHEN BASTIAN (DE)
Application Number:
PCT/CN2017/113973
Publication Date:
June 06, 2019
Filing Date:
November 30, 2017
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CHINA TRIUMPH INT ENG CO LTD (CN)
CTF SOLAR GMBH (DE)
International Classes:
B65G47/54; B65G49/06
Domestic Patent References:
WO2017151368A12017-09-08
Foreign References:
CN103787027A2014-05-14
CN103787067A2014-05-14
CN106516738A2017-03-22
CN101988191A2011-03-23
CN107210258A2017-09-26
CN105679698A2016-06-15
US20130206065A12013-08-15
CN103787027A2014-05-14
Other References:
See also references of EP 3717385A4
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
Download PDF: