Title:
METHOD AND DEVICE FOR CORRECTING NON-LINEAR ERRORS OF SINGLE-FREQUENCY LASER INTERFEROMETER
Document Type and Number:
WIPO Patent Application WO/2020/098227
Kind Code:
A1
Abstract:
A method and device for correcting non-linear errors of a single-frequency laser interferometer, which relate to the technical field of laser measurement. The present invention uses a liquid crystal phase retarder to generate a continuous optical path difference variation between a measurement beam and a reference beam without needing to change positions of a first mirror and a second mirror, so that an interference signal generates a sufficient phase change. The pre-extraction of feature parameters of the interference signal is achieved, and thus non-linear errors in a displacement measurement process of the single-frequency laser interferometer are corrected by using the pre-extracted feature parameters so as to achieve high-precision displacement measurement. The present invention achieves the pre-extraction of the feature parameters of the interference signal of the single-frequency laser interferometer, may effectively solve the correction problem of non-linear errors in interference measurements, especially micro-displacement measurements, and has significant technical advantages in the field of precision measurement.
Inventors:
HU PENGCHENG (CN)
FU HAIJIN (CN)
WANG KE (CN)
TAN JIUBIN (CN)
FU HAIJIN (CN)
WANG KE (CN)
TAN JIUBIN (CN)
Application Number:
PCT/CN2019/083984
Publication Date:
May 22, 2020
Filing Date:
April 24, 2019
Export Citation:
Assignee:
HARBIN INST TECHNOLOGY (CN)
International Classes:
G01B9/02; G01B11/02
Foreign References:
| CN109539975A | 2019-03-29 | |||
| JP2004150965A | 2004-05-27 | |||
| CN104748672A | 2015-07-01 | |||
| CN106705858A | 2017-05-24 | |||
| CN102435136A | 2012-05-02 |
Attorney, Agent or Firm:
KINGSOUND & PARTNERS (CN)
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