METHOD AND DEVICE FOR DECOMPOSING CIRCUIT MEMBER BY WATER IN SUPERCRITICAL FLUID STATE

Title:

METHOD AND DEVICE FOR DECOMPOSING CIRCUIT MEMBER BY WATER IN SUPERCRITICAL FLUID STATE

Document Type and Number:

WIPO Patent Application WO/2000/020140

Kind Code:

A1

Abstract:

A supercritical fluid is formed by heating a liquid-state water (13) sealed along with a circuit member (30) into an airtight container (2) by an internal heating means (4) to heat the water (13) to not lower than a preset temperature and pressurize it to not lower than a preset pressure. A supercritical fluid, being extremely high in intermolecular collision rate, can deliver a specific dissolution power and activate various reactions favorably to thereby satisfactorily and quickly decompose a circuit member (30) which is difficult to be decomposed by a liquid- or gaseous-state water. In addition, an addition of sulfur (14) to a liquid-state water (13) can recover various metals from a circuit member (30) favorably.

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Inventors:

SUGIMOTO YOSHIMI (JP)
WATANABE MASAO (JP)

Application Number:

PCT/JP1999/005404

Publication Date:

April 13, 2000

Filing Date:

October 01, 1999

Export Citation:

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Assignee:

ADVANTEST CORP (JP)
SUGIMOTO YOSHIMI (JP)
WATANABE MASAO (JP)

International Classes:

B09B3/00; B01D11/02; B08B7/00; B09B5/00; C22B3/00; C22B7/00; (IPC1-7): B09B3/00; C08J11/00

Foreign References:

JPH10237215A	1998-09-08
JPH09164328A	1997-06-24
JPH1024274A	1998-01-27

Other References: