Title:
METHOD AND DEVICE FOR DETECTING FOREIGN SUBSTANCE CONTAINED IN INSPECTION TARGET
Document Type and Number:
WIPO Patent Application WO/2022/163421
Kind Code:
A1
Abstract:
This method for detecting a specific foreign substance contained in an inspection target includes: acquiring first image data of the inspection target, the first image data having pixels each having a pixel value of a first band group including one or more wavelength bands (S110, S210); determining, using the first image data, one or more pixel regions satisfying a first condition as a first foreign substance region (S120, S230); acquiring second image data of a region including the first foreign substance region, the second image data having pixels each having a pixel value of a second band group including more wavelength bands than the first band group (S152, S260); determining, using the second image data, one or more pixel regions satisfying a second condition different from the first condition as a second foreign substance region where the specific foreign substance exists (S154, S270); and outputting information about the second foreign substance region (S180, S300).
Inventors:
NISHIO KAZUAKI
Application Number:
PCT/JP2022/001492
Publication Date:
August 04, 2022
Filing Date:
January 18, 2022
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G06T7/00; G01N21/27; G01N21/88; G06T1/00; G06T3/40
Domestic Patent References:
| WO2020023213A1 | 2020-01-30 | |||
| WO2021246192A1 | 2021-12-09 | |||
| WO2021192891A1 | 2021-09-30 |
Foreign References:
| JP2020524328A | 2020-08-13 | |||
| JP2013164338A | 2013-08-22 | |||
| JP2016105084A | 2016-06-09 | |||
| JP2016156801A | 2016-09-01 |
Attorney, Agent or Firm:
KAMATA Kenji et al. (JP)
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