Title:
METHOD AND DEVICE FOR GENERATING OPTICAL RADIATION BY MEANS OF ELECCTRICALLY OPERATED PULSED DISCHARGES
Document Type and Number:
WIPO Patent Application WO/2013/020613
Kind Code:
A8
Abstract:
The present invention relates to a method and device for generating optical radiation (18), in particular EUV radiation or soft x-rays, by means of electrically operated discharges. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6), which is applied to one or several surface (s) moving i the discharge space and is at least partially evaporated by one or several pulsed energy beam(s) (9). At least two consecutive pulses (16) are applied withi a time interval of each electrical discharge onto said surface (s). The delay between and/or the pulse energy of said consecutive pulses is controlled to stabilize the position of an emission center of the plasma (15).
Inventors:
PRUEMMER RALF (DE)
CONRADS RALF (DE)
BERGMANN KLAUS (DE)
KUEPPER FELIX (DE)
JONKERS JEROEN (DE)
CONRADS RALF (DE)
BERGMANN KLAUS (DE)
KUEPPER FELIX (DE)
JONKERS JEROEN (DE)
Application Number:
PCT/EP2012/002483
Publication Date:
November 28, 2013
Filing Date:
June 12, 2012
Export Citation:
Assignee:
FRAUNHOFER GES FORSCHUNG (DE)
XTREME TECH GMBH (DE)
PRUEMMER RALF (DE)
CONRADS RALF (DE)
BERGMANN KLAUS (DE)
KUEPPER FELIX (DE)
JONKERS JEROEN (DE)
XTREME TECH GMBH (DE)
PRUEMMER RALF (DE)
CONRADS RALF (DE)
BERGMANN KLAUS (DE)
KUEPPER FELIX (DE)
JONKERS JEROEN (DE)
International Classes:
H05G2/00
Attorney, Agent or Firm:
GAGEL, Roland (München, DE)
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