Title:
METHOD AND DEVICE FOR MEASURING OXIDANT CONCENTRATION, AND ELECTRONIC MATERIAL CLEANING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/163456
Kind Code:
A1
Abstract:
A method for measuring oxidant concentration is provided which can easily be put online, and which is capable of efficiently measuring, with excellent accuracy, the oxidant concentration in a sulfuric acid solution including a metal and an oxidant, without being affected by impurities such as metals. A sulfuric acid solution including a metal and an oxidant is mixed with a potassium iodide solution, the UV absorbance at any wavelength in the range of 200-600 nm is measured, and the oxidant concentration of the sulfuric acid solution is determined on the basis of the measurement result. The potassium iodide (KI) solution is added to the sulfuric acid solution including the metal and the oxidant to selectively react the oxidizing substance in the sulfuric acid solution with KI, and cause the oxidizing substance to be coloured yellow by the free iodine. As a result, the UV sensitivity becomes higher than that of impurities such as metals, the effect of impurities such as metals is reduced, and the UV absorbance can be measured with high accuracy.
Inventors:
OGAWA YUICHI (JP)
Application Number:
PCT/JP2016/076829
Publication Date:
September 28, 2017
Filing Date:
September 12, 2016
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
G01N31/00; G01N21/77; G01N21/78
Domestic Patent References:
| WO2015012041A1 | 2015-01-29 | |||
| WO2014046229A1 | 2014-03-27 | |||
| WO2016114188A1 | 2016-07-21 |
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Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
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