Title:
METHOD AND DEVICE FOR MODIFYING OBJECT TO BE PROCESSED BY USING ULTRASHORT PULSE LASER
Document Type and Number:
WIPO Patent Application WO/2017/052045
Kind Code:
A1
Abstract:
The present invention relates to a processing device for modifying the surface or the inside of an object to be processed by using an ultrashort pulse laser, and a method for modifying an object to be processed, by using the processing device, through cutting or surface-treatment, using an ultrashort pulse laser beam, of at least a portion of the object to be processed, the processing device comprising: a stage on which the object to be processed is to be loaded; a laser beam emission device comprising a laser source for generating an ultrashort pulse laser beam and an optical system for emitting the laser beam generated by the laser source on the object to be processed loaded on the stage; a laser beam control unit capable of setting a laser processing condition for generating an ultrashort pulse laser beam suitable for the object to be processed and three-dimensional spatial coordinates of the object to be processed; and a scanning electron microscope capable of observing the surface of the object to be processed, according to the pulse laser beam emission.
Inventors:
KIM YUNSEOK (KR)
YO JOONHO (KR)
YO JOONHO (KR)
Application Number:
PCT/KR2016/007257
Publication Date:
March 30, 2017
Filing Date:
July 05, 2016
Export Citation:
Assignee:
LASERNICS (KR)
International Classes:
B23K26/0622; B23K26/00; B23K26/03; B23K26/06; B23K26/08; B23K26/38
Foreign References:
| KR20150048627A | 2015-05-07 | |||
| JP2014157772A | 2014-08-28 | |||
| KR101358672B1 | 2014-02-11 | |||
| KR101262173B1 | 2013-05-14 | |||
| KR100790707B1 | 2008-01-02 |
Attorney, Agent or Firm:
GHONG-GAN INTERNATIONAL PATENT LAW FIRM (KR)
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