Title:
METHOD AND DEVICE FOR PLASMA-TREATING WORKPIECES
Document Type and Number:
WIPO Patent Application WO/2012/051975
Kind Code:
A8
Abstract:
The method and the device are used to plasma-treat workpieces. The workpiece is inserted into a chamber of a treatment station that can be at least partially evacuated. The plasma chamber is bounded by a chamber bottom, a chamber cover, and a lateral chamber wall. A coating is deposited on the workpiece by means of the plasma treatment. The plasma is ignited by pulsed microwave energy. Switch-on phases and switch-off phases of a microwave input are specified by a controller. The relation between the duration of the switch-on phases and the duration of the switch-off phases is changed during the execution of the treatment process for a workpiece.
Inventors:
SIEBELS SOENKE (DE)
KYTZIA SEBASTIAN (DE)
KYTZIA SEBASTIAN (DE)
Application Number:
PCT/DE2011/001691
Publication Date:
May 16, 2013
Filing Date:
September 01, 2011
Export Citation:
Assignee:
KHS CORPOPLAST GMBH (DE)
SIEBELS SOENKE (DE)
KYTZIA SEBASTIAN (DE)
SIEBELS SOENKE (DE)
KYTZIA SEBASTIAN (DE)
International Classes:
C23C16/26; B65D23/02; C23C16/02; C23C16/04; C23C16/40; C23C16/503; C23C16/511; C23C16/515; C23C16/52
Attorney, Agent or Firm:
EMMEL, Thomas (Bolte & Partner GbRBeselerstraße 6, Hamburg, DE)
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