Title:
METHOD AND DEVICE FOR POLISHING DOUBLE SIDES
Document Type and Number:
WIPO Patent Application WO/2000/069597
Kind Code:
A1
Abstract:
A method of polishing the double sides of a plurality of works simultaneously by rotating a plurality of carriers between upper and lower rotating surface plates, comprising the steps of forming the works (400) integrally with the carriers (500) on the outside of a polishing device main body (110), feeding the works (400) onto a rotating surface plate (111) on the underside of the polishing device main body (110) with the works formed integrally with the carriers (500), injecting liquid such as water from the upper side rotating surface plate when the upper side rotating surface plate is raised after the double sides are polished, holding the plurality of works (400) on the lower side rotating surface plate (111) after the double sides are polished, enabling the works (400) to be discharged automatically from the lower side rotating surface plate (111), providing a brush storage part (180) and a dresser storage part (190) near the polishing device main body (110), and frequently treating a polishing cloth installed on the opposed surfaces of the upper and lower rotating surface plates with a brush and a dresser.
Inventors:
HORIGUCHI AKIRA (JP)
ISOBE KEN (JP)
TANAKA HEIGO (JP)
FUKUSHIMA TOMIO (JP)
MURATA KIYOHIDE (JP)
TAKEDA TSUNEO (JP)
UZU YOSHIAKI (JP)
MATSUMOTO HIROSHI (JP)
ISOBE KEN (JP)
TANAKA HEIGO (JP)
FUKUSHIMA TOMIO (JP)
MURATA KIYOHIDE (JP)
TAKEDA TSUNEO (JP)
UZU YOSHIAKI (JP)
MATSUMOTO HIROSHI (JP)
Application Number:
PCT/JP2000/003159
Publication Date:
November 23, 2000
Filing Date:
May 17, 2000
Export Citation:
Assignee:
KASHIWARA MACHINE MFG CO LTD (JP)
SUMITOMO METAL IND (JP)
HORIGUCHI AKIRA (JP)
ISOBE KEN (JP)
TANAKA HEIGO (JP)
FUKUSHIMA TOMIO (JP)
MURATA KIYOHIDE (JP)
TAKEDA TSUNEO (JP)
UZU YOSHIAKI (JP)
MATSUMOTO HIROSHI (JP)
SUMITOMO METAL IND (JP)
HORIGUCHI AKIRA (JP)
ISOBE KEN (JP)
TANAKA HEIGO (JP)
FUKUSHIMA TOMIO (JP)
MURATA KIYOHIDE (JP)
TAKEDA TSUNEO (JP)
UZU YOSHIAKI (JP)
MATSUMOTO HIROSHI (JP)
International Classes:
B24B7/17; B24B37/08; B24B41/00; B24B53/007; B24B53/017; (IPC1-7): B24B37/04; B24B37/00; H01L21/304; H01L21/68
Foreign References:
| JPS6225148U | 1987-02-16 | |||
| JPS61203264A | 1986-09-09 | |||
| JPS61151859U | 1986-09-19 | |||
| JPH09253994A | 1997-09-30 | |||
| JPS5859559U | 1983-04-22 | |||
| JP2546640B2 | 1996-10-23 | |||
| JPS60259372A | 1985-12-21 | |||
| JPH01321257A | 1989-12-27 | |||
| JPH0268948A | 1990-03-08 | |||
| JPH09193002A | 1997-07-29 |
Attorney, Agent or Firm:
Ubukata, Motoshige (Kawaramachi 4-chome Chuo-ku Osaka-shi Osaka, JP)
Download PDF: