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Title:
METHOD AND DEVICE FOR POLISHING DOUBLE SIDES
Document Type and Number:
WIPO Patent Application WO/2000/069597
Kind Code:
A1
Abstract:
A method of polishing the double sides of a plurality of works simultaneously by rotating a plurality of carriers between upper and lower rotating surface plates, comprising the steps of forming the works (400) integrally with the carriers (500) on the outside of a polishing device main body (110), feeding the works (400) onto a rotating surface plate (111) on the underside of the polishing device main body (110) with the works formed integrally with the carriers (500), injecting liquid such as water from the upper side rotating surface plate when the upper side rotating surface plate is raised after the double sides are polished, holding the plurality of works (400) on the lower side rotating surface plate (111) after the double sides are polished, enabling the works (400) to be discharged automatically from the lower side rotating surface plate (111), providing a brush storage part (180) and a dresser storage part (190) near the polishing device main body (110), and frequently treating a polishing cloth installed on the opposed surfaces of the upper and lower rotating surface plates with a brush and a dresser.

Inventors:
Horiguchi, Akira (103 12-11, Mamigaoka 7-chome Kashiba-shi Nara, Mamigaoka 7-chome Kashiba-shi Nara, 639-0223, JP)
Isobe, Ken (1-38, Okayama 2-chome Shijyonawate-shi Osaka, 575-0002, JP)
Tanaka, Heigo (5030-2, Ura, Karatsu-shi Saga, 847-0124, JP)
Fukushima, Tomio (1-22, Ooi 3-chome Fujiidera-shi Osaka, 583-0008, JP)
Murata, Kiyohide (16-30, Takakura-cho Nishinomiya-shi Hyogo, 662-0872, JP)
Takeda, Tsuneo (19 Okuda, Kasagi Aza, Kasagi-cho Sourakugun Kyoto, 619-1303, JP)
Uzu, Yoshiaki (Room 201, Famiiru Wakakusa 6-7-2, Seyahigashi Sangou-cho Ikomagun Nara, 636-0811, JP)
Matsumoto, Hiroshi (2-23-3, Tatsunominami Sangou-cho Ikomagun Nara, 636-0822, JP)
Application Number:
PCT/JP2000/003159
Publication Date:
November 23, 2000
Filing Date:
May 17, 2000
Export Citation:
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Assignee:
KASHIWARA MACHINE MFG. CO., LTD. (1-22, Kawaharacho, Kashiwara-shi Osaka, 582-0004, JP)
SUMITOMO METAL INDUSTRIES, LTD. (5-33, Kitahama 4-chome Chuo-ku Osaka-shi Osaka, 541-0041, JP)
Horiguchi, Akira (103 12-11, Mamigaoka 7-chome Kashiba-shi Nara, Mamigaoka 7-chome Kashiba-shi Nara, 639-0223, JP)
Isobe, Ken (1-38, Okayama 2-chome Shijyonawate-shi Osaka, 575-0002, JP)
Tanaka, Heigo (5030-2, Ura, Karatsu-shi Saga, 847-0124, JP)
Fukushima, Tomio (1-22, Ooi 3-chome Fujiidera-shi Osaka, 583-0008, JP)
Murata, Kiyohide (16-30, Takakura-cho Nishinomiya-shi Hyogo, 662-0872, JP)
Takeda, Tsuneo (19 Okuda, Kasagi Aza, Kasagi-cho Sourakugun Kyoto, 619-1303, JP)
Uzu, Yoshiaki (Room 201, Famiiru Wakakusa 6-7-2, Seyahigashi Sangou-cho Ikomagun Nara, 636-0811, JP)
Matsumoto, Hiroshi (2-23-3, Tatsunominami Sangou-cho Ikomagun Nara, 636-0822, JP)
International Classes:
B24B7/17; B24B37/08; B24B41/00; B24B53/007; B24B53/017; (IPC1-7): B24B37/04; B24B37/00; H01L21/304; H01L21/68
Foreign References:
JPS6225148U
JPS61203264A
JPS61151859U
JPH09253994A
JPS5859559U
JP2546640B2
JPS60259372A
JPH01321257A
JPH0268948A
JPH09193002A
Attorney, Agent or Firm:
Ubukata, Motoshige (6-15, Kawaramachi 4-chome Chuo-ku Osaka-shi Osaka, 541-0048, JP)
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