Title:
METHOD AND DEVICE FOR PRODUCING NANOPORES
Document Type and Number:
WIPO Patent Application WO/2023/210595
Kind Code:
A1
Abstract:
One embodiment of the present invention provides a method for processing a thin film, said method comprising: (a) provision of a thin film; (b) irradiation of the thin film with an electron beam; (c) observation of the thin film and determination of whether pores satisfying a prescribed condition have been formed therein; and (d) repetition of (b) and (c) if it is determined in (c) that the pores satisfying the prescribed condition have not been formed.
Inventors:
HSU WEI-LUN (JP)
TAKAMOTO AKIHIDE (JP)
OSHIKAWA HIROYUKI (JP)
MARUYAMA SHIGEO (JP)
DAIGUJI HIROFUMI (JP)
LEE CHUN YEN (JP)
TAKAMOTO AKIHIDE (JP)
OSHIKAWA HIROYUKI (JP)
MARUYAMA SHIGEO (JP)
DAIGUJI HIROFUMI (JP)
LEE CHUN YEN (JP)
Application Number:
PCT/JP2023/016155
Publication Date:
November 02, 2023
Filing Date:
April 24, 2023
Export Citation:
Assignee:
UNIV TOKYO (JP)
International Classes:
H01J37/305; B82Y40/00; G01N23/04; G01N27/00; G01N33/483
Foreign References:
| JP2016082893A | 2016-05-19 |
Other References:
"Doctoral Dissertation", 1 January 2021, KEIO UNIVERSITY, JP, article YANAGI, RENA: "Study on detection of single-stranded DNA sequence using solid-state nanopores", pages: 1 - 141, XP009550095
GRAF MICHAEL; LIHTER MARTINA; THAKUR MUKESHCHAND; GEORGIOU VASILEIA; TOPOLANCIK JURAJ; ILIC B. ROBERT; LIU KE; FENG JIANDONG; ASTI: "Fabrication and practical applications of molybdenum disulfide nanopores", NATURE PROTOCOLS, NATURE PUBLISHING GROUP, GB, vol. 14, no. 4, 22 March 2019 (2019-03-22), GB , pages 1130 - 1168, XP036742124, ISSN: 1754-2189, DOI: 10.1038/s41596-019-0131-0
STORM A J, ET AL.: "FABRICATION OF SOLID-STATE NANOPORES WITH SINGLE-NANOMETRE PRECISION", NATURE MATERIALS, NATURE PUBLISHING GROUP, LONDON, GB, vol. 02, no. 08, 13 July 2003 (2003-07-13), GB , pages 537 - 540, XP008046585, ISSN: 1476-4660, DOI: 10.1038/nmat941
GU CHAOMING; YU ZHOUBIN; LI XIAOJIE; ZHU XIN; CAO ZHEN; YE ZHI; JIN CHUANHONG; LIU YANG: "Experimental study of protein translocation through MoS2nanopores", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS, 2 HUNTINGTON QUADRANGLE, MELVILLE, NY 11747, vol. 115, no. 22, 26 November 2019 (2019-11-26), 2 Huntington Quadrangle, Melville, NY 11747, XP012242486, ISSN: 0003-6951, DOI: 10.1063/1.5128499
GRAF MICHAEL; LIHTER MARTINA; THAKUR MUKESHCHAND; GEORGIOU VASILEIA; TOPOLANCIK JURAJ; ILIC B. ROBERT; LIU KE; FENG JIANDONG; ASTI: "Fabrication and practical applications of molybdenum disulfide nanopores", NATURE PROTOCOLS, NATURE PUBLISHING GROUP, GB, vol. 14, no. 4, 22 March 2019 (2019-03-22), GB , pages 1130 - 1168, XP036742124, ISSN: 1754-2189, DOI: 10.1038/s41596-019-0131-0
STORM A J, ET AL.: "FABRICATION OF SOLID-STATE NANOPORES WITH SINGLE-NANOMETRE PRECISION", NATURE MATERIALS, NATURE PUBLISHING GROUP, LONDON, GB, vol. 02, no. 08, 13 July 2003 (2003-07-13), GB , pages 537 - 540, XP008046585, ISSN: 1476-4660, DOI: 10.1038/nmat941
GU CHAOMING; YU ZHOUBIN; LI XIAOJIE; ZHU XIN; CAO ZHEN; YE ZHI; JIN CHUANHONG; LIU YANG: "Experimental study of protein translocation through MoS2nanopores", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS, 2 HUNTINGTON QUADRANGLE, MELVILLE, NY 11747, vol. 115, no. 22, 26 November 2019 (2019-11-26), 2 Huntington Quadrangle, Melville, NY 11747, XP012242486, ISSN: 0003-6951, DOI: 10.1063/1.5128499
Attorney, Agent or Firm:
AKATSU Takeshi (JP)
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