Title:
METHOD AND DEVICE FOR PUMPING OF A PROCESS CHAMBER
Document Type and Number:
WIPO Patent Application WO/2014/012896
Kind Code:
A3
Abstract:
The present invention relates to a pumping device intended to be connected to a process chamber (2) comprising a dry primary vacuum pump (3), an auxiliary pumping means (4) mounted so that said pumping means bypasses a check valve (13) on the vacuum pump (3), a first valve device (5) connected to a means for purging (11) the dry primary vacuum pump (3) and intended to be connected to a gas supply (14), a second valve device (6) mounted so that said second valve device bypasses a check valve (13) upstream from the auxiliary pumping means (4), and a control means configured to control the first and second valve devices (5, 6) on the basis of an operating status of the process chamber (2) in such a way that the first valve device (5) is at least partially closed and the second valve device (6) is open when the process chamber (2) is operating at ultimate vacuum. The present invention also relates to a method for pumping of a process chamber (2) by means of such a pumping device (1).
Inventors:
SEIGEOT BERTRAND (FR)
Application Number:
PCT/EP2013/064929
Publication Date:
May 15, 2014
Filing Date:
July 15, 2013
Export Citation:
Assignee:
ADIXEN VACUUM PRODUCTS (FR)
International Classes:
F04C23/00; F04B37/14; F04C25/02; F04C28/02; F04C29/00; F04F1/00; F04F5/00
Domestic Patent References:
| WO2005071509A1 | 2005-08-04 |
Foreign References:
| FR2952683A1 | 2011-05-20 | |||
| FR2691382A1 | 1993-11-26 |
Attorney, Agent or Firm:
CROONENBROEK, Thomas et al. (11 Avenue des Tilleuls, Thonon les Bains, FR)
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