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Patent Searching and Data


Title:
METHOD AND DEVICE FOR RADIOFREQUENCY IMPEDANCE MATCHING, AND SEMICONDUCTOR PROCESSING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2019/206135
Kind Code:
A1
Abstract:
Disclosed are a method, a device, and equipment for radiofrequency impedance matching, comprising: S110, a frequency sweep matching phase; and S120, a frequency sweep holding phase. S110 comprises the loop execution of the following steps for at least once: S111, acquiring a frequency sweep termination parameter of a radiofrequency power supply when at least one predetermined pulse phase of a current pulse cycle is finished; S112, determining whether the frequency sweep termination parameters of the predetermined pulse phases of the current pulse cycle match a target frequency sweep parameter; executing S120 when a match is found and executing S113 when no match is found; S113, in predetermined pulse phases of the next pulse cycle, the radiofrequency power supply performs frequency sweeps respectively on the basis of the frequency sweep termination parameters of the predetermined pulse phases of the previous pulse cycle; and S120 comprising: in predetermined pulse phases of subsequent pulse cycles, the radiofrequency power supply stops frequency sweeping and holds the frequency sweep termination parameter matching the target frequency sweep parameter. This allows a quick frequency sweep for a match with the target frequency sweep parameter and effectively ensures that a pulsed plasma is ignited smoothly.

Inventors:
WEI, Gang (NO.8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
WEI, Jing (NO.8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
YANG, Jing (NO.8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
Application Number:
CN2019/083882
Publication Date:
October 31, 2019
Filing Date:
April 23, 2019
Export Citation:
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Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. (NO.8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
International Classes:
H01J37/32
Foreign References:
CN103650645A2014-03-19
CN107887247A2018-04-06
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (ZHANG, Tianshu10th Floor, Tower D, Minsheng Financial Center, 28 Jianguomennei Avenue, Dongcheng District, Beijing 5, 100005, CN)
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