Title:
METHOD, DEVICE AND SYSTEM FOR DETECTING DEFECT OF TRANSPARENT/TRANSLUCENT MATERIAL
Document Type and Number:
WIPO Patent Application WO/2020/061882
Kind Code:
A1
Abstract:
A method for detecting a defect in a transparent/translucent material, comprising: determining one or more sampling point positions according to a preset sampling configuration; controlling a coherent light source (10) to generate a coherent light beam to irradiate a sampling point, wherein the coherent light beam irradiates a sampling point position of a layered detection material during detection; acquiring, by means of a photosensitive element, interference image information of a light signal reflected by the coherent light beam after irradiating the detection material (30); calculating material thickness information corresponding to the sampling point position according to the interference image information, and determining a defect of the layered detection material according to the material thickness information. In addition, further disclosed are a device that detects a defect in a transparent/translucent material using the method above and a detection system that detects a defect in a transparent/translucent material using the method above. The accuracy of the thickness defect detection of the transparent/translucent layered material may be improved.
Inventors:
WANG XINGZE (CN)
YAN JING (CN)
SHU YUAN (CN)
YAN JING (CN)
SHU YUAN (CN)
Application Number:
PCT/CN2018/107860
Publication Date:
April 02, 2020
Filing Date:
September 27, 2018
Export Citation:
Assignee:
HEREN KEJI SHENZHEN LLC (CN)
International Classes:
G01B11/06
Foreign References:
| CN101101200A | 2008-01-09 | |||
| CN101799277A | 2010-08-11 | |||
| CN106662431A | 2017-05-10 | |||
| CN107687815A | 2018-02-13 | |||
| JP5057848B2 | 2012-10-24 |
Attorney, Agent or Firm:
SCIHEAD IP LAW FIRM (CN)
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