Title:
METHOD FOR DEVICE, AND METHOD AND SYSTEM FOR MANUFACTURING MASK OR DISPLAY SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2018/076591
Kind Code:
A1
Abstract:
Disclosed is a method for a device. The device is used for manufacturing or using a mask or a display substrate. The method comprises the following steps: providing a master mask; a step of setting measurement points: setting a plurality of measurement points on the master mask according to a mask or display substrate to be measured, wherein the plurality of measurement points correspond to positions where the pixel position accuracy of the mask or display substrate to be measured is to be measured; and a step of measuring an error value: putting the master mask under a coordinate system of the device, and measuring the error value between the device and the master mask at each measurement point.
Inventors:
LIN ZHIMING (CN)
WANG ZHEN (CN)
ZHANG JIAN (CN)
HUANG CHUN CHIEH (CN)
WANG ZHEN (CN)
ZHANG JIAN (CN)
HUANG CHUN CHIEH (CN)
Application Number:
PCT/CN2017/076087
Publication Date:
May 03, 2018
Filing Date:
March 09, 2017
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
ORDOS YUANSHENG OPTOELECTRONICS CO LTD (CN)
ORDOS YUANSHENG OPTOELECTRONICS CO LTD (CN)
International Classes:
G03F1/72
Foreign References:
| CN101414130A | 2009-04-22 | |||
| CN1596384A | 2005-03-16 | |||
| CN104894510A | 2015-09-09 | |||
| CN104593721A | 2015-05-06 | |||
| US7422828B1 | 2008-09-09 | |||
| US20060047456A1 | 2006-03-02 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
Download PDF: