Title:
METHOD AND DEVICE UTILIZING PLASMA SOURCE FOR REAL-TIME GAS SAMPLING
Document Type and Number:
WIPO Patent Application WO2002044687
Kind Code:
A3
Abstract:
Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas (105) to emit radiation and detecting (109) in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces (112) may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined.
Inventors:
POWELL GARY (US)
HAZARD RICHARD L (US)
HAZARD RICHARD L (US)
Application Number:
PCT/US2001/044585
Publication Date:
February 27, 2003
Filing Date:
November 29, 2001
Export Citation:
Assignee:
LIGHTWIND CORP (US)
POWELL GARY (US)
HAZARD RICHARD L (US)
POWELL GARY (US)
HAZARD RICHARD L (US)
International Classes:
G01N1/22; G01N21/68; H01L21/205; H01L21/3065; (IPC1-7): G01J3/30; G01J3/443; G01N21/00
Foreign References:
| US5986747A | 1999-11-16 | |||
| US4857136A | 1989-08-15 | |||
| US5949193A | 1999-09-07 | |||
| US4609426A | 1986-09-02 |
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