Title:
METHOD FOR DISPLAYING SUBSTRATE POSITIONING DATA, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING DEVICE, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2022/064882
Kind Code:
A1
Abstract:
This method for displaying substrate positioning data has: a setting step for setting each of a transfer parameter that determines at least the positioning of a substrate in a plan for mounting on a substrate-holding implement, and carrier information stored by the substrate that is planned to be mounted on the substrate-holding implement; a creation step for creating, on the basis of the set transfer parameter and carrier information, substrate positioning data for a case in which the substrate is mounted on the substrate-holding implement; and a display step for displaying data that indicates the positioning of the substrate at least in a state in which the substrate is mounted on the substrate-holding implement when displaying the substrate positioning data.
Inventors:
SUIZU YUNA (JP)
ABIKO HAJIME (JP)
NISHIURA SUSUMU (JP)
FUNAKURA MITSURU (JP)
KATO TAKUYA (JP)
ABIKO HAJIME (JP)
NISHIURA SUSUMU (JP)
FUNAKURA MITSURU (JP)
KATO TAKUYA (JP)
Application Number:
PCT/JP2021/029418
Publication Date:
March 31, 2022
Filing Date:
August 06, 2021
Export Citation:
Assignee:
KOKUSAI ELECTRIC CORP (JP)
International Classes:
H01L21/31; H01L21/677
Foreign References:
| JP2009135418A | 2009-06-18 | |||
| JPH11121586A | 1999-04-30 | |||
| JP2009231748A | 2009-10-08 | |||
| JP2009135418A | 2009-06-18 | |||
| JP2020160829A | 2020-10-01 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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