Title:
METHOD AND EQUIPMENT BASED ON MULTI-CORE FIBER BRAGG GRATING PROBE FOR MEASURING STRUCTURES OF A MICRO PART
Document Type and Number:
WIPO Patent Application WO/2015/106621
Kind Code:
A1
Abstract:
A method and equipment based on multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into spectrum shifts of the multi-core FBG probe, and to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the multi-core FBG probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.
Inventors:
CUI JIWEN (CN)
FENG KUNPENG (CN)
LI JUNYING (CN)
TAN JIUBIN (CN)
FENG KUNPENG (CN)
LI JUNYING (CN)
TAN JIUBIN (CN)
Application Number:
PCT/CN2014/094987
Publication Date:
July 23, 2015
Filing Date:
December 25, 2014
Export Citation:
Assignee:
HARBIN INST OF TECHNOLOGY (CN)
International Classes:
G01B11/24; G01B11/03
Domestic Patent References:
| WO2013010857A1 | 2013-01-24 |
Foreign References:
| CN103759653A | 2014-04-30 | |||
| CN101871771A | 2010-10-27 | |||
| CN1466673A | 2004-01-07 | |||
| CN103759643A | 2014-04-30 | |||
| CN103759642A | 2014-04-30 | |||
| CN103759641A | 2014-04-30 | |||
| CN103759652A | 2014-04-30 | |||
| CN102589439A | 2012-07-18 | |||
| CN102022980A | 2011-04-20 |
Attorney, Agent or Firm:
INTELLECPRO CHINA LIMITED (Patent Division11/F, Tower C, Five Buildings, 9 Chegongzhuang Dajie, Xicheng District, Beijing 4, CN)
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