METHOD AND EQUIPMENT FOR SUPPLYING FLUORINE-GAS-CONTAINING GAS

Title:

METHOD AND EQUIPMENT FOR SUPPLYING FLUORINE-GAS-CONTAINING GAS

Document Type and Number:

WIPO Patent Application WO/2020/049900

Kind Code:

A1

Abstract:

Provided is a method for supplying a fluorine-gas-containing gas without complicating the device configuration of equipment for supplying the fluorine-gas-containing gas, and without reducing the fluorine gas concentration of the fluorine-gas-containing gas. A sealing step is carried out in which a second fluorine-gas-containing gas having a fluorine gas concentration in a range of ±10% of the fluorine gas concentration of a first fluorine-gas-containing gas is introduced into a portion of a pipe (4) between a container valve (3) and a pressure regulator (7) such that a pressure less than the gas pressure in a charging container (2) is achieved. After the sealing step a buffer tank (9) is opened and the first fluorine-gas-containing gas is introduced into the portion of the pipe (4) between the container valve (3) and the pressure regulator (7) from the charging container (2), after which the pressure regulator (7) is opened and the first fluorine-gas-containing gas is supplied to consumption equipment (20) while the pressure is regulated by the pressure regulator (7).

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Inventors:

NISHIO YUYA (JP)

Application Number:

PCT/JP2019/029860

Publication Date:

March 12, 2020

Filing Date:

July 30, 2019

Export Citation:

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Assignee:

SHOWA DENKO KK (JP)

International Classes:

F17C7/00; F16K7/16; F17C13/00

Foreign References:

JP2015212558A	2015-11-26
JP2011140680A	2011-07-21
JP2007107904A	2007-04-26
JP2006144950A	2006-06-08
JP2007255666A	2007-10-04
US20130012027A1	2013-01-10
JP2012154429A	2012-08-16
JP2012167813A	2012-09-06
JP2015212558A	2015-11-26

Other References: