Title:
METHOD OF EVALUATING CURRENT-DRIVEN CONDUCTIVE MATERIAL
Document Type and Number:
WIPO Patent Application WO/1995/000971
Kind Code:
A1
Abstract:
This invention aims at providing a method of evaluating a current-driven conductive material such as wiring conductor, in which the resistance to electromigration and the resistance to stress migration are independently measured in a short time. A first current is supplied to a conductor to measure its resistance value, and a second current larger than the first current is supplied for a predetermined period to cause its physical properties to change. Thereafter, the resistance value of the conductor is again measured by using the first current. This procedure is repeated for accelerated evaluation of reliability of the conductor. In this method, the duration of the second current is sufficiently smaller than that of the first current so that electromigration may be measured within a temperature rise of 50 �C. To measure stress migration, on the other hand, the second current is set so that electromigration may not occur, and it is fed at intervals less than 10 ms so that the temperature rise may exceed 100 �C.
Inventors:
OHMI TADAHIRO (JP)
Application Number:
PCT/JP1994/000991
Publication Date:
January 05, 1995
Filing Date:
June 21, 1994
Export Citation:
Assignee:
OHMI TADAHIRO (JP)
International Classes:
G01R27/02; G01N27/00; G01R31/26; G01R31/28; H01L21/66; (IPC1-7): H01L21/66
Foreign References:
| JPH04329654A | 1992-11-18 | |||
| JPH04186745A | 1992-07-03 | |||
| JPH0377080A | 1991-04-02 | |||
| EP0448273A1 | 1991-09-25 | |||
| JPH01500784A | 1989-03-16 |
Other References:
See also references of EP 0656650A4
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