Title:
METHOD FOR EVALUATING ORGANIC MATERIAL CONTAMINATION ON SURFACE OF SEMICONDUCTOR SUBSTRATE AND USE OF SAME
Document Type and Number:
WIPO Patent Application WO/2016/002273
Kind Code:
A1
Abstract:
An embodiment according to the present invention relates to a method for evaluating organic material contamination on the surface of a semiconductor substrate that includes acquisition of photoluminescence intensity information on the surface of the semiconductor substrate being evaluated as well as performing evaluation of evaluation items selected from a group formed from absence or presence, extent, and surface distribution of organic material contamination on the surface of the semiconductor substrate being evaluated on the basis of the acquired photoluminescence intensity information.
Inventors:
FUKUSHIMA SHINYA (JP)
ERIGUCHI KAZUTAKA (JP)
ERIGUCHI KAZUTAKA (JP)
Application Number:
PCT/JP2015/059062
Publication Date:
January 07, 2016
Filing Date:
March 25, 2015
Export Citation:
Assignee:
SUMCO CORP (JP)
International Classes:
H01L21/66; G01N21/64
Domestic Patent References:
| WO2011015412A1 | 2011-02-10 |
Foreign References:
| JP2003045928A | 2003-02-14 | |||
| JP2011095016A | 2011-05-12 | |||
| JP2011233761A | 2011-11-17 | |||
| JPH01272945A | 1989-10-31 | |||
| JPH02307047A | 1990-12-20 |
Attorney, Agent or Firm:
SIKs & Co. (JP)
Patent business corporation patent firm Sykes (JP)
Patent business corporation patent firm Sykes (JP)
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