METHOD OF EXTRACTING CONTOUR LINES OF IMAGE DATA OBTAINED BY MEANS OF CHARGED PARTICLE BEAM DEVICE, AND CONTOUR LINE EXTRACTION DEVICE

WIPO Patent Application WO/2011/090111

A1

Disclosed is a contour extraction method aiming to suppress unnecessary contour processing, or, selectively creating contour lines of necessary parts; also disclosed is a contour extraction device. The contour device extracts contour lines of pattern edges on an image formed on the basis of charged particles emitted from a sample. When the contour lines are extracted from the pattern located in an overlapping area created when images of multiple imaging areas are connected to form a synthesized image, surface areas of said pattern in the aforementioned multiple imaging areas, or pre-set measurement sites, are found, and selective contour line extraction of the aforementioned pattern is performed on the image of the imaging area of the larger of said surface areas, or on the side where the measurement site of said pattern is located.

MITO Hiroaki (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
三藤　啓明 (〒04 茨城県ひたちなか市大字市毛８８２番地　株式会社　日立ハイテクノロジーズ　那珂事業所内 Ibaraki, 〒3128504, JP)

JP2011/050965

July 28, 2011

January 20, 2011

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HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishishimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社　日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
MITO Hiroaki (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)

G01B15/04; G01N23/225

ASAMURA PATENT OFFICE, p.c. (Room 331, New Ohtemachi Bldg. 2-1, Ohtemachi 2-chome, Chiyoda-k, Tokyo 04, 〒1000004, JP)

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