METHOD FOR FABRICATING FILM-FORMED BODY BY AEROSOL DEPOSITION

Title:

METHOD FOR FABRICATING FILM-FORMED BODY BY AEROSOL DEPOSITION

Document Type and Number:

WIPO Patent Application WO/2007/105670

Kind Code:

A1

Abstract:

There is provided a method for stably fabricating a film-formed body having a thick film by aerosol deposition. Raw material microparticles are sprayed from a plurality of nozzles toward a substantially identical area on a deposition substrate and the incident angle on the substrate is controlled, thereby forming the film-formed body while etching the deposited film.

More Like This:

JP2017133095	PROCESSING METHOD OF ARTICLE, TURBINE COMPONENT AND AEROFOIL
WO/2011/070789	PROCESS FOR FORMING HIGH SURFACE AREA EMBEDDED COATING WITH HIGH ABRASION RESISTANCE
JP4772082	Method of forming surface strengthening film and surface strengthening products

Inventors:

YOKOYAMA SEIICHI (JP)
MIURA MICHIYORI (JP)

Application Number:

PCT/JP2007/054778

Publication Date:

September 20, 2007

Filing Date:

March 12, 2007

Export Citation:

Click for automatic bibliography generation Help

Assignee:

HOYA CORP (JP)
YOKOYAMA SEIICHI (JP)
MIURA MICHIYORI (JP)

International Classes:

C23C24/04; C03C17/23

Foreign References:

JP2001038274A	2001-02-13
JP2005076104A	2005-03-24
JP2001003180A	2001-01-09

Attorney, Agent or Firm:

ANIYA, Setuo et al. (4-6-1 Iidabash, Chiyoda-ku Tokyo, JP)

Download PDF:

View/Download PDF PDF Help

Previous Patent: INSTRUMENT FOR PLANT CULTIVATION AND METHOD OF PLANT CULTIVATION

Next Patent: PLANAR LIGHT SOURCE DEVICE