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Patent Searching and Data


Title:
METHOD OF FABRICATING SUPERCONDUCTING WIRE
Document Type and Number:
WIPO Patent Application WO/2020/235005
Kind Code:
A1
Abstract:
A method of fabricating a superconducting wire includes forming a buffer layer on the substrate, the buffer layer including an Al2O3 layer, the Al2O3 layer being formed by reactive magnetron sputtering in which first oxygen gas as reactant gas and a sputtering target made of aluminium metal are used, the Al2O3 layer being formed while being supplied the first oxygen gas at a first concentration, the first concentration being a concentration of the first oxygen gas at which an emission intensity of Al in plasma near a surface of the sputtering target is not less than 25% and not more than 80% of a first reference value, the first reference value being the emission intensity of Al at which the concentration of the first oxygen gas is zero; and forming a superconducting layer above the buffer layer.

Inventors:
PETRYKIN VALERY (JP)
LI SERGEY (JP)
Application Number:
JP2019/020130
Publication Date:
November 26, 2020
Filing Date:
May 21, 2019
Export Citation:
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Assignee:
SUPEROX JAPAN LLC (JP)
International Classes:
H01B13/00; H01B12/06
Foreign References:
JP2016143516A2016-08-08
Attorney, Agent or Firm:
HIRATA & PARTNERS (JP)
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