Title:
METHOD FOR FABRICATING SURFACE HAVING NANO-MICRO HIERARCHICAL STRUCTURE BY USING CAPILLARY FORCE
Document Type and Number:
WIPO Patent Application WO/2023/146042
Kind Code:
A1
Abstract:
The present invention relates to a method for fabricating a reentrant structure and a surface having fine irregularities on the top thereof by a simple process using capillary force, the method comprising the steps of: forming a resin layer by applying an ultraviolet curable resin on a first substrate on which a first micropattern is formed; forming a second micropattern in a columnar shape on a second substrate; bringing the resin layer and the micropattern into contact with each other by moving the first substrate or the second substrate such that the resin layer and the second micropattern face each other; curing the resin by irradiating ultraviolet rays in a state where the resin located around pillars of the second micropattern is moved by capillary force by a predetermined distance along the pillars in the longitudinal direction of the second micropattern; and removing the first substrate after the ultraviolet irradiation is completed, wherein the first micropattern is smaller in size than the second micropattern, and the first micropattern is formed in intaglio.
Inventors:
CHO YOUNG TAE (KR)
KIM SEOK (KR)
CHOI SU HYUN (KR)
KIM WOO YOUNG (KR)
OH SEUNG MIN (KR)
KIM SEOK (KR)
CHOI SU HYUN (KR)
KIM WOO YOUNG (KR)
OH SEUNG MIN (KR)
Application Number:
PCT/KR2022/011081
Publication Date:
August 03, 2023
Filing Date:
July 27, 2022
Export Citation:
Assignee:
NAT UNIV CHANGWON IND ACADEMY COOP CORPS (KR)
International Classes:
G03F7/00; G03F7/16
Foreign References:
| KR100696193B1 | 2007-03-20 | |||
| CN104914494A | 2015-09-16 | |||
| KR20160029941A | 2016-03-16 | |||
| KR20080033676A | 2008-04-17 |
Other References:
KIM SEONJUN, KIM DO HYEOG, CHOI SU HYUN, KIM WOO YOUNG, KWON SIN, CHO YOUNG TAE: "Effect of surface pattern morphology on inducing superhydrophobicity", APPLIED SURFACE SCIENCE, ELSEVIER, AMSTERDAM , NL, vol. 513, 1 May 2020 (2020-05-01), Amsterdam , NL , pages 145847, XP093074415, ISSN: 0169-4332, DOI: 10.1016/j.apsusc.2020.145847
Attorney, Agent or Firm:
KIM, Youn Gwon (KR)
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