Title:
METHOD FOR FABRICATION OF A MOLECULAR FILTER AND APPARATUS FORMED BY THE SAME
Document Type and Number:
WIPO Patent Application WO2002092497
Kind Code:
A3
Abstract:
The invention is a method for fabricating molecular filters (20) which can separate objects approximately 1-5 nm in range, where the filtration size is controlled by using thin films of materials and technologies to form a filtration channel or pore (22) in a middle thin film layer in a multilayered structure. Lithography is used to define two offset arrays of blind holes into the opposing sides of a multi-layer membrane. The blind holes extend across a thin central filtration layer. A selective etch is used to attack the filtration to form a communicating channel between the two holes (10, 12). The only connection between one side of the filter and the other is through the channel in the filter layer, whose thickness, d, determines the largest size object which can traverse the filter.
Inventors:
SCHERER AXEL (US)
Application Number:
PCT/US2002/014773
Publication Date:
July 24, 2003
Filing Date:
May 10, 2002
Export Citation:
Assignee:
CALIFORNIA INST OF TECHN (US)
SCHERER AXEL (US)
SCHERER AXEL (US)
International Classes:
B01D61/18; B01D67/00; B01D69/02; B01D71/02; B81B1/00; F15C5/00; F16K99/00; (IPC1-7): B01D25/00
Foreign References:
| US4721567A | 1988-01-26 | |||
| US5399265A | 1995-03-21 | |||
| US2028168A | 1936-01-21 | |||
| US1955158A | 1934-04-17 | |||
| US3812972A | 1974-05-28 |
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