Title:
METHOD FOR FIXING METAL NANOPARTICLE
Document Type and Number:
WIPO Patent Application WO/2007/108480
Kind Code:
A1
Abstract:
A pattern is formed by dropping a solution, which includes metal nanoparticles bonded
with polymer, on a substrate at least the front surface of which has an insulating characteristic.
After drying the substrate, plasma is applied on the pattern.
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Inventors:
OJIMA KAORU (JP)
TAKAGI AKIHIKO (JP)
YAMADA FUMIHIKO (JP)
MATSUMOTO TAKUYA (JP)
KAWAI TOMOJI (JP)
TAKAGI AKIHIKO (JP)
YAMADA FUMIHIKO (JP)
MATSUMOTO TAKUYA (JP)
KAWAI TOMOJI (JP)
Application Number:
PCT/JP2007/055719
Publication Date:
September 27, 2007
Filing Date:
March 20, 2007
Export Citation:
Assignee:
JAPAN SCIENCE & TECH AGENCY (JP)
UNIV OSAKA (JP)
OJIMA KAORU (JP)
TAKAGI AKIHIKO (JP)
YAMADA FUMIHIKO (JP)
MATSUMOTO TAKUYA (JP)
KAWAI TOMOJI (JP)
UNIV OSAKA (JP)
OJIMA KAORU (JP)
TAKAGI AKIHIKO (JP)
YAMADA FUMIHIKO (JP)
MATSUMOTO TAKUYA (JP)
KAWAI TOMOJI (JP)
International Classes:
B82B3/00; B22F1/00; C23C26/00; H01L29/06
Domestic Patent References:
WO2005117126A1 | 2005-12-08 |
Foreign References:
JP2004190089A | 2004-07-08 | |||
JP2004136377A | 2004-05-13 | |||
JP2005519780A | 2005-07-07 | |||
JP2000212766A | 2000-08-02 |
Other References:
OJIMA K., DAI 53 KAI OYO BUTSURIGAKU KANKEI RENGO KOENKAI YOKOSHU, 22 March 2006 (2006-03-22), pages 1304 + ABSTR. NO. 24P-N-17, XP003017889
OJIMA K.: "Program Jiko Soshikika ni yoru Nano Zairyo.Nanodevice no Sosei", JOURNAL OF THE SURFACE SCIENCE SOCIETY OF JAPAN, vol. 27, no. 3, 10 March 2006 (2006-03-10), pages 151 - 156, XP003017890
OJIMA K.: "Program Jiko Soshikika ni yoru Nano Zairyo.Nanodevice no Sosei", JOURNAL OF THE SURFACE SCIENCE SOCIETY OF JAPAN, vol. 27, no. 3, 10 March 2006 (2006-03-10), pages 151 - 156, XP003017890
Attorney, Agent or Firm:
SUZUYE, Takehiko et al. (1-12-9 Toranomo, Minato-ku Tokyo 01, JP)
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