Title:
METHOD FOR FORMING CARBONACEOUS MATERIAL PROTRUSION AND CARBONACEOUS MATERIAL PROTRUSION
Document Type and Number:
WIPO Patent Application WO/2005/093775
Kind Code:
A1
Abstract:
A method for forming a carbonaceous material protruding structure, which includes a process of coating a diamond board (10) with a resist (11), a process of opening a hole (12) on the resist (11) applied and processing a wall (12b) of the hole (12) to reversely taper it from an opening part (12a) to a bottom side, a process of depositing a mask material from the side of the opening part (12a) and forming a mask deposit (14) inside the hole (12), a process of lifting off the mask material (13) deposited on the resist (11) with the resist (11), and a process of etching the diamond board (10) using the mask deposit (14) as a mask and forming a carbonaceous material protrusion. The method for forming the carbonaceous material protruding structure for providing a fine and sharp-angle protruding leading edge, the protrusion having a high aspect ratio and a board plane which is flat except the protrusion, and the carbonaceous material protruding structure are provided.
Inventors:
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Miyazaki, Tomihito c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Hattori, Tetsuya c/o Yokohama Works of Sumitomo Electric Industries Ltd. (1, Taya-cho, Sakae-ku, Yokohama-sh, Kanagawa 88, 24485, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Miyazaki, Tomihito c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Hattori, Tetsuya c/o Yokohama Works of Sumitomo Electric Industries Ltd. (1, Taya-cho, Sakae-ku, Yokohama-sh, Kanagawa 88, 24485, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Application Number:
PCT/JP2005/005408
Publication Date:
October 06, 2005
Filing Date:
March 24, 2005
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES, LTD. (5-33, Kitahama 4-chome Chuo-ku, Osaka-sh, Osaka 41, 54100, JP)
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Miyazaki, Tomihito c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Hattori, Tetsuya c/o Yokohama Works of Sumitomo Electric Industries Ltd. (1, Taya-cho, Sakae-ku, Yokohama-sh, Kanagawa 88, 24485, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Miyazaki, Tomihito c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Hattori, Tetsuya c/o Yokohama Works of Sumitomo Electric Industries Ltd. (1, Taya-cho, Sakae-ku, Yokohama-sh, Kanagawa 88, 24485, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
International Classes:
H01L21/28; B81C1/00; B82B3/00; G01N13/16; H01J1/304; H01J9/02; (IPC1-7): H01J9/02; B82B3/00; G01N13/16; H01J1/304
Attorney, Agent or Firm:
Hasegawa, Yoshiki (SOEI PATENT AND LAW FIRM, Ginza First Bldg. 10-6, Ginza 1-chome, Chuo-k, Tokyo 61, 10400, JP)
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